Skip to main content
SpringerLink
Log in

Effects of Growth Parameters on Surface-morphological, Structural, Electrical and Optical Properties of AZO Films by RF Magnetron Sputtering

  • Published:
MRS Online Proceedings Library Aims and scope

Abstract

500 nm-thick aluminum-doped zinc oxide (ZnO:Al) thin film is usually used as a front transparent conductive oxide (TCO) contact on photovoltaic devices, and for this application is often deposited by a reactive radio-frequency (r.f.) magnetron sputtering system from a ceramic target. This work reports on the preparation and characterization of AZO thin films on Corning 1737 glass substrates grown by reactive r.f.-magnetron sputtering from a ZnO ceramic target with 2 wt% Al content. It was found that the growth parameters, such as chamber pressure, working power, and deposition temperature, have significant influences on the properties of AZO films. According to the experimental results: (1) Films were polycrystalline showing a strong preferred c-axis orientation. (2) With increasing working power, the resistivity decreased, and mobility and the carrier concentration increased. (3) Lower deposition temperature leads to a decrease in resistivity, with 2.5×10−4 Ω-cm representing the lowest resistivity reached.

This is a preview of subscription content, log in via an institution to check access.

Access this article

Log in via an institution

Price excludes VAT (USA)
Tax calculation will be finalised during checkout.

Instant access to the full article PDF.

Institutional subscriptions

Similar content being viewed by others

References

  1. C. G. Granqvist, Solar Energy Mater. Solar Cells 91, 1529 (2007).

    Article  CAS  Google Scholar 

  2. Jae-Hyeong Lee, Jun-Tae Song, Thin Solid Films 516, 1377 (2008).

    Article  CAS  Google Scholar 

  3. R. Latz, K. Michael, M. Scherer, Jpn. J. Appl. Phys. 30 (2A), L149 (1991).

    Article  CAS  Google Scholar 

  4. S. Mandal, R.K. Singha, A. Dhar, S.K. Ray, Mater. Res. Bull. 43, 244 (2007).

    Article  Google Scholar 

  5. Jaehyeong Lee, Dongjin Lee, Donggun Lim, Keajoon Yang, Thin Solid Films 515, 6094 (2007).

    Article  CAS  Google Scholar 

  6. T. Szörényi, L.D. Laude, I. Bertóti, Z. Kántor, Zs. Geretovsky, J. Appl. Phys. 78, 6211 (1995).

    Article  Google Scholar 

  7. O. Kluth, G. Schöpe, B. Rech, R. Menner, M. Oertel, K. Orgassa, H.W. Schock, Thin Solid Films 502, 311 (2006).

    Article  CAS  Google Scholar 

  8. P. Nunes, D. Costa, E. Fortunato, R. Martins, Vacuum 64, 293 (2002).

    Article  CAS  Google Scholar 

  9. Y. M. Lu, W. S. Hwang, W. Y. Liu, J. S. Yang, Mater. Chem. Phys. 72, 269 (2001).

    Article  CAS  Google Scholar 

  10. W. F. Liu, G. T. Du, Y. F. Sun, J. M. Bian, Y. Chang, T. P. Yang, Y. C. Chang, Y. B. Xu, Applied Surface Science 253, 2999 (2007).

    Article  CAS  Google Scholar 

  11. B.D. Cullity, Elements of X-ray Diffraction, second ed., Addison Wesley, Reading, MA, 1978.

    Google Scholar 

Download references

Acknowledgments

The authors would like to gratefully acknowledge partial financial support from the Green Technology Research Center of Chang Gung University.

Author information

Authors and Affiliations

  1. Department of Electronic Engineering, Chang Gung University, Taiwan

    Shou-Yi Kuo, Wei-Ting Lin, Liann-Be Chang & Ming-Jer Jeng

  2. Green Technology Research Center, Chang Gung University, Taiwan, 259 Wen-Hwa 1st Road, Kweishan, Taoyuan, 333, Taiwan

    Shou-Yi Kuo, Liann-Be Chang & Ming-Jer Jeng

  3. Department of Optics and Photonics, National Central University, Taiwan

    Wei-Ting Lin

  4. Chemical Systems Research Division, Chung-Sung institute of Science & Technology, Taiwan

    Yong-Tian Lu & Sung-Cheng Hu

Authors
  1. Shou-Yi Kuo
    View author publications

    You can also search for this author in PubMed Google Scholar

  2. Wei-Ting Lin
    View author publications

    You can also search for this author in PubMed Google Scholar

  3. Liann-Be Chang
    View author publications

    You can also search for this author in PubMed Google Scholar

  4. Ming-Jer Jeng
    View author publications

    You can also search for this author in PubMed Google Scholar

  5. Yong-Tian Lu
    View author publications

    You can also search for this author in PubMed Google Scholar

  6. Sung-Cheng Hu
    View author publications

    You can also search for this author in PubMed Google Scholar

Rights and permissions

Reprints and permissions

About this article

Cite this article

Kuo, SY., Lin, WT., Chang, LB. et al. Effects of Growth Parameters on Surface-morphological, Structural, Electrical and Optical Properties of AZO Films by RF Magnetron Sputtering. MRS Online Proceedings Library 1201, 532 (2009). https://doi.org/10.1557/PROC-1201-H05-32

Download citation

  • Published:

  • DOI: https://doi.org/10.1557/PROC-1201-H05-32

Search

Navigation