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Bottom-up Fabrication of Individual SnO2 Nanowires-based Gas Sensors on Suspended Micromembranes

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Abstract

Bottom – up techniques were used to obtain gas sensors based on individual SnO2 nanowires placed over microhotplates with integrated heaters. These nanowires were electrically contacted to pre-patterned microelectrodes by means of Focused Ion Beam (FIB) nanofabrication methodologies. The performance of these sensors, which exhibit reproducible and stable responses, was evaluated as function of different gas atmospheres and dissipated power by the heater, demonstrating that this technological approach could be used to develop functional devices based on nanomaterials.

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References

  1. Xing-Jiu Huang and Yang-Kyu Choi Sensors Actuators B 2007) 122 659.

    Article  CAS  Google Scholar 

  2. Y. Chen, C. Zhu, M. Cao, T. Wang, Nanotenology 2007), 18, 285502.

    Article  Google Scholar 

  3. Francisco Hernández-Ramírez, Albert Tarancón, Olga Casals, Jordi Rodríguez, Albert Romano-Rodríguez, Joan R Morante, Sven Barth, Sanjay Mathur, Tae Y Choi, Dimos Poulikakos, Victor Callegari and Philipp M Nellen, Nanotechnology 2006) 17 5577

    Article  Google Scholar 

  4. S. Mathur, S. Barth, H. Shen, J. C. Pyun, U. Werner, Small 2005), 1, 713.

    Article  CAS  Google Scholar 

  5. J. Spannhake, A. Helwig, G. Müller, G. Faglia, G. Sberveglieri, T. Doll, T. Wassner, M. Eickhoff . Sensors and Actuators B 2007), 124, 421–428.

    Article  CAS  Google Scholar 

  6. Strata DB 235. Product data sheet, FEI Company.

  7. E. Pescio, A. Ridi, A. Gliozzi, Review of Scientific Instruments. 2000), 71, 1740.

    Article  CAS  Google Scholar 

  8. F Hernandez-Ramirez, J D Prades, A Tarancon, S Barth, O Casals, R Jiménez–Diaz, E Pellicer, J Rodriguez, M A Juli, A Romano -Rodriguez, J R Morante, S Mathur, A Helwig, J Spannhake and G Mueller, Nanotechnology 2007) 18 495501

    Article  CAS  Google Scholar 

  9. F. Hernández – Ramírez, A. Tarancón, O. Casals, E. Pellicer, J. Rodríguez, A. Romano – J. R. Rodríguez, Morante, S. Barth, S. Mathur . Phys. Rev. B. 2007), 76 085429

    Article  Google Scholar 

  10. A. Botman, J. J. L. Mulders, R. Weemaes and S. Mentink, Nanotechnology 17, 15 (14 August 2006), 3779–3785

    Article  CAS  Google Scholar 

  11. A. Kolmakov, M. Moskovits, Annu. Rev. Mater. Res. 2004), 34, 83.

    Article  Google Scholar 

  12. F. Hernandez–Ramirez, A. Tarancon, O. Casals, J. Arbiol, A. Romano–Rodriguez, J. R. Morante, Sensors and Actuators B 2006), 121, 13.

    Google Scholar 

  13. Accurate estimation of the real temperature of the nanowires is complex since uncontrolled self-heating effects on these nanostructures should be considered. For this reason, in this work only dissipated power and nominal temperatures at the centre of the membrane are mentioned.

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Romano-Rodriguez, A., Hernandez-Ramirez, F., Joan, D.P. et al. Bottom-up Fabrication of Individual SnO2 Nanowires-based Gas Sensors on Suspended Micromembranes. MRS Online Proceedings Library 1052, 802 (2007). https://doi.org/10.1557/PROC-1052-DD08-02

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  • DOI: https://doi.org/10.1557/PROC-1052-DD08-02

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