Abstract
Bottom – up techniques were used to obtain gas sensors based on individual SnO2 nanowires placed over microhotplates with integrated heaters. These nanowires were electrically contacted to pre-patterned microelectrodes by means of Focused Ion Beam (FIB) nanofabrication methodologies. The performance of these sensors, which exhibit reproducible and stable responses, was evaluated as function of different gas atmospheres and dissipated power by the heater, demonstrating that this technological approach could be used to develop functional devices based on nanomaterials.
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References
Xing-Jiu Huang and Yang-Kyu Choi Sensors Actuators B 2007) 122 659.
Y. Chen, C. Zhu, M. Cao, T. Wang, Nanotenology 2007), 18, 285502.
Francisco Hernández-Ramírez, Albert Tarancón, Olga Casals, Jordi Rodríguez, Albert Romano-Rodríguez, Joan R Morante, Sven Barth, Sanjay Mathur, Tae Y Choi, Dimos Poulikakos, Victor Callegari and Philipp M Nellen, Nanotechnology 2006) 17 5577
S. Mathur, S. Barth, H. Shen, J. C. Pyun, U. Werner, Small 2005), 1, 713.
J. Spannhake, A. Helwig, G. Müller, G. Faglia, G. Sberveglieri, T. Doll, T. Wassner, M. Eickhoff . Sensors and Actuators B 2007), 124, 421–428.
Strata DB 235. Product data sheet, FEI Company.
E. Pescio, A. Ridi, A. Gliozzi, Review of Scientific Instruments. 2000), 71, 1740.
F Hernandez-Ramirez, J D Prades, A Tarancon, S Barth, O Casals, R Jiménez–Diaz, E Pellicer, J Rodriguez, M A Juli, A Romano -Rodriguez, J R Morante, S Mathur, A Helwig, J Spannhake and G Mueller, Nanotechnology 2007) 18 495501
F. Hernández – Ramírez, A. Tarancón, O. Casals, E. Pellicer, J. Rodríguez, A. Romano – J. R. Rodríguez, Morante, S. Barth, S. Mathur . Phys. Rev. B. 2007), 76 085429
A. Botman, J. J. L. Mulders, R. Weemaes and S. Mentink, Nanotechnology 17, 15 (14 August 2006), 3779–3785
A. Kolmakov, M. Moskovits, Annu. Rev. Mater. Res. 2004), 34, 83.
F. Hernandez–Ramirez, A. Tarancon, O. Casals, J. Arbiol, A. Romano–Rodriguez, J. R. Morante, Sensors and Actuators B 2006), 121, 13.
Accurate estimation of the real temperature of the nanowires is complex since uncontrolled self-heating effects on these nanostructures should be considered. For this reason, in this work only dissipated power and nominal temperatures at the centre of the membrane are mentioned.
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Romano-Rodriguez, A., Hernandez-Ramirez, F., Joan, D.P. et al. Bottom-up Fabrication of Individual SnO2 Nanowires-based Gas Sensors on Suspended Micromembranes. MRS Online Proceedings Library 1052, 802 (2007). https://doi.org/10.1557/PROC-1052-DD08-02
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DOI: https://doi.org/10.1557/PROC-1052-DD08-02