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The Role of Pore Characterization in the Challenge to Integrate Porous low-k Dielectrics

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Extended abstract to Symposium B

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References

  1. D. W. Gidley, H-G. Peng, and R. S. Vallery, Annual Review of Materials Research 36, 49 (2006).

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  1. Physics, University of Michigan, Ann Arbor, MI, 48109-1040, USA

    David W. Gidley, Richard S. Vallery & Ming Liu

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  1. David W. Gidley
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  2. Richard S. Vallery
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  3. Ming Liu
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Gidley, D.W., Vallery, R.S. & Liu, M. The Role of Pore Characterization in the Challenge to Integrate Porous low-k Dielectrics. MRS Online Proceedings Library 990, 206 (2006). https://doi.org/10.1557/PROC-0990-B02-06

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  • DOI: https://doi.org/10.1557/PROC-0990-B02-06

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