Abstract
We report temperature-dependent electrical resistivity (or dc conductivity, sdc) down to 4 K for pristine and gamma-irradiated microwave plasma-assisted chemical vapor-deposited boron-doped diamond films with [B]/[C]gas = 4000 ppm to gain insights into the nature of conduction mechanism, distribution, and kinetics of point defects generated due to gamma irradiation prompted by the article [Gupta et al., J. Mater. Res.24, 1498 (2009)]. The pristine samples exhibit typical metallic conduction up to 50 K and with reduction in temperature to 25 K, the sdc decreases monotonically followed by saturation at 4 K, suggesting “disordered” metal or “localized” behavior. For irradiated films, continuous increasing resistivity with decreasing temperature demonstrates semiconducting behavior with thermal activation/hopping conduction phenomena. It is intriguing to propose that irradiation leads to substantial hydrogen redistribution leading to unexpected low-temperature resistivity behavior. Scanning tunneling microscopy/spectroscopy helped to illustrate local grain and grain boundary effects.
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References
P.W. May The new diamond age? Science 319, 1490 (2008)
E. Kohn, P. Gluche, M. Adamschik Diamond MEMS—A new emerging technology Diamond Relat. Mater. 8, 934 (1999)
A. Aleksov, M. Kubovic, N. Kaeb, U. Spitzberg, A. Bergmaier, G. Dollinger, Bauer Th., M. Schreck, B. Stritzker, E. Kohn Diamond field effect transistors—Concepts and challenges Diamond Relat. Mater. 12, 391 (2003)
A.E. Fischer, Y. Show, G.M. Swain Electrochemical performance of diamond thin-film electrodes from different commercial sources Anal. Chem. 76, 2553 (2004)
I.V. Grekhov, G.A. Mesyats Nanosecond semiconductor diodes for pulsed power switching Phs. Usp. 48, 703 (2005)
S. Koizumi, K. Watanabe, M. Hasegawa, H. Kanda Ultraviolet emission from a diamond pn junction Science 292, 1899 (2001)
M.Y. Liao, Y. Koide, J. Alvarez High-performance metal-semiconductor-metal deep-ultraviolet photodetectors based on homoepitaxial diamond thin film Appl. Phys. Lett. 88, 0335041 (2006)
A.T. Collins The Properties and Growth of Diamond edited by G. Davies (Inspec, London 1994)
K. Kobashi Diamond Films: Chemical Vapor Deposition for Oriented and Heteroepitaxial Growth (Elsevier, Amesterdam 2005)
R. Kalish Properties of Diamond edited by G. Davies (INSPEC 1994) Chap. 6.
S. Gupta, R.S. Katiyar, D.R. Gilbert, R.K. Singh, G. Morell Microstructural studies of diamond thin films grown by electron cyclotron resonance-assisted chemical vapor deposition J. Appl. Phys. 88, 5695 (2000)
J.A. Garrido, C.E. Nebel, M. Stutzmann, E. Gheeraert, N. Casanova, E. Bustarret, A. Deneuville A new acceptor state in CVD-diamond Diamond Relat. Mater. 11, 347 (2002)
R. Kalish The search for donors in diamond Diamond Relat. Mater. 10, 1749 (2001)
J. Isberg, J. Hammersberg, E. Johansson, WikströT. m, D.J. Twitchen, A.J. Whitehead, S.E. Coe, G.A. Scarsbrook High carrier mobility in single-crystal plasma-deposited diamond Science 297, 1670 (2003)
S. Gupta, B.R. Weiner, G. Morell Synthesis and characterization of sulfur-incorporated microcrystalline diamond and nanocrystalline carbon thin films by hot filament chemical vapor deposition J. Mater. Res. 18, 363 (2003)
A.W.S. Williams, E.C. Lightowlers, A.T. Collins Impurity conduction in synthetic semiconducting diamond J. Phys. C: Solid State Phys. 3, 1727 (1970)
E. Bustarret, E. Gheeraert, K. Watanabe Optical and electronic properties of heavily boron-doped homo-epitaxial diamond Phys. Status Solidi A 199, 9 (2003)
A.E. Fischer, Y. Show, G.M. Swain Electrochemical performance of diamond thin-film electrodes from different commercial sources Anal. Chem. 76, 2553 (2004)
Mareš J.J., HubíP. k, KrišJ. tofik, M. Nesladek Selected topics related to the transport and superconductivity in boron-doped diamond Sci. Technol. Adv. Mater. 9, 044101 (2008)
W. Gajewski, P. Achatz, O.A. Williams, K. Haenen, E. Bustarret, M. Stutzmann, J.A. Garrido Electronic and optical properties of boron-doped nanocrystalline diamond films Phys. Rev. B: Condens. Matter 79, 045206 (2009)
R. Kalish, C. Uzan-Saguy, B. Philosoph, V. Richter Loss of electrical conductivity in boron-doped diamond due to ion-induced damage Appl. Phys. Lett. 70, 999 (1997)
I. Polyakov, A.I. Rukovishnikov, B.M. Garin, L.A. Avdeeva, R. Heidinger, V.V. Parshin, V.G. Ralchenko Electrically active defects, conductivity, and millimeter wave dielectric loss in CVD diamonds Diam. and Relat. Mater. 14, 604 (2005)
S. Gupta, M. Muralikiran, J. Farmer, L.R. Cao, R.G. Downing The effect of boron doping and gamma irradiation on the structure and properties of microwave chemical vapor deposited boron-doped diamond films J. Mater. Res. 24, 1498 (2009)
L. Milazzo, A. Mainwood Modeling of diamond radiation detectors J. Appl. Phys. 96, 5845 (2004)
P. Gonon, S. Prawer, D.N. Jamieson, K.W. Nugent Radiation hardness of polycrystalline diamond Diamond Relat. Mater. 6, 314 (1997)
M. Bruzzi, S. Miglio, S. Pirollo, S. Sciortino Electrical properties and defect analysis of neutron irradiated undoped CVD diamond films Diamond Relat. Mater. 10, 601 (2001)
S. Gupta, B.L. Weiss, B.R. Weiner, L. Pilione, A. Badzian, G. Morell Electron field emission properties of gamma irradiated microcrystalline diamond and nanocrystalline carbon thin films J. Appl. Phys. 92, 3311 (2002)
S. Gupta, O.A. Williams, E. Bohannan Electrostatic force microscopy studies of boron-doped diamond films J. Mater. Res. 22, 3014 (2007)
J.A. Bennett, J. Wang, Y. Show, G.M. Swain Effect of sp2-bonded nondiamond carbon impurity on the response of boron-doped polycrystalline diamond thin-film electrodes J. Electrochem. Soc. 151, E306 (2004)
S. Prawer, R.J. Nemanich Raman spectroscopy of diamond and doped diamond Proc. R. Soc. London, Ser. A 362, 2537 (2004)
J.W. Ager III, W. Walukiewicz, M. McMluskey, M.A. Plano, M.I. Landstrass Fano interference of the Raman phonon in heavily boron-doped diamond films grown by chemical vapor deposition Appl. Phys. Lett. 66, 616 (1995)
S. Gupta, A. Dudipala, O.A. Williams, K. Haenen, E. Bohannan Ex situ variable angle spectroscopic ellipsometry studies on chemical vapor deposited boron-doped diamond films: Layered structure and modeling aspects J. Appl. Phys. 104, 073514 (2008)
M. Bernard, C. Baron, A. Deneuville About the origin of the low wave number structures of the Raman spectra of heavily boron doped diamond films Diamond Relat. Mater. 13, 896 (2004)
V. Privitera, E. Schroer, F. Priolo, E. Napolitani, A. Carnera Electrical behavior of ultra-low energy implanted boron in silicon J. Appl. Phys. 88, 1299 (2000)
K. Ushizawa, K. Watanabe, T. Ando, I. Sakaguchi, M. Nishitani-Gamo, Y. Sato, H. Kanda Boron concentration dependence of Raman spectra on {100} and {111} facets of B-doped CVD diamond Diamond Relat. Mater. 7, 1719 (1998)
P. Pruvost, E. Bustarret, A. Deneuville Characteristics of homoepitaxial heavily boron-doped diamond films from their Raman spectra Diamond Relat. Mater. 9, 295 (2000)
P. Pruvost, A. Deneuville Analysis of the Fano in diamond Diamond Relat. Mater. 10, 531 (2001)
U. Fano Effects of configuration interaction on intensities and phase shifts Phys. Rev. 124, 1886 (1961)
K. Nashimura, K. Das, J.T. Glass Material and electrical characterization of polycrystalline boron-doped diamond films grown by microwave plasma chemical vapor deposition J. Appl. Phys. 69, 3142 (1991)
R. Shinar, M. Leksono, H.R. Shanks Effect of boron doping on the surfaces of diamond thin films J. Vac. Sci. Technol., A 11, 569 (1993)
M. Kaukonen, P.K. Sitch, G. Jungnickel, R.M. Nieminen, D. Sami Pöykkö, D. Porezag, Frauenheim Th. Effect of N and B doping on the growth of CVD diamond (100):H(2×1) surfaces Phys. Rev. B: Condens. Matter 57, 9965 (1998)
R. Kalish The search for donors in diamond Diamond Relat. Mater. 10, 1749 (2001)
M.E. Newton, B.A. Campbell, D.J. Twitchen Recombination-enhanced diffusion of self-interstitial atoms and vacancy–interstitial recombination in diamond Diamond Relat. Mater. 11, 618 (2002)
J. Walker Optical absorption and luminescence in diamond Rep. Prog. Phys. 42, 1605 (1979)
P.D. Edwards, M.J. Sienko Universality aspects of the metal-nonmetal transition in condensed media Phys. Rev. B: Condens. Matter 17, 2575 (1978)
N.F. Mott Metal-insulator transition Rev. Mod. Phys. 40, 677 (1968)
T. Sato, K. Ohashi, H. Sugai, T. Sumi, K. Haruna, H. Maeta, N. Matsumoto, H. Otsuka Transport of heavily boron-doped synthetic semiconductor diamond in the hopping regime Phys. Rev. B: Condens. Matter 61, 12970 (2000)
Y. Takano, M. Nagao, I. Sakaguchi, M. Tachiki, T. Hatano, K. Kobayashi, H. Umezawa, H. Kawarada Superconductivity in diamond thin films well above liquid helium temperature Appl. Phys. Lett. 85, 2851 (2004)
E. Bustarret, E. Gheeraert, K. Watanabe Optical and electronic properties of heavily boron-doped homo-epitaxial diamond Phys. Status Solidi A 199, 9 (2003)
C. Piccirillo, G. Davies, A. Mainwood, C.M. Penchina Investigation on boron-doped CVD samples Diamond Relat. Mater. 11, 338 (2002)
P.W. Anderson Absence of diffusion in certain random lattices Phys. Rev. 109, 1492 (1958)
N.F. Mott Metal Insulator Transitions (Taylor and Francis, London, 1974). N.F. Mott and E.A. Davis: Electronic Processes in Non-Crystalline Materials, 2nd Ed (Clarendon Press, Oxford 1979)
J. Hubbard Electron correlations in narrow energy bands. II. The degenerate band case Proc. R. Soc. London, Ser. A 277, 237 (1964)
A. Schmid On the dynamics of electrons in an impure metal Z. Phys. 271, 251 (1974)
R.S. Knox Theory of Excitons edited by S. Amelinckx (Academic, New York 1963)
B. Massarani, J.C. Bourgoin, R.M. Chrenko Hopping conduction in semiconducting diamond Phys. Rev. B: Condens. Matter 17, 1758 (1978)
A. Reznik, C. Uzan-Saguy, R. Kalish Effects of point defects on the electrical properties of doped diamond Diamond Relat. Mater. 9, 1051 (2000)
V. Ambegaokar, B.I. Halperin, J.S. Langer Hopping conductivity in disordered systems Phys. Rev. B: Condens. Matter 4, 2612 (1971)
T. Nishizaki, Y. Takanao, M. Nagao, T. Takenouchhi, H. Kawarada, N. Kobayashi Low-temperature STM/STS studies on boron-doped (1 1 1) diamond films J. Phys. Chem. Solids 69, 3027 (2008)
J.M. Perez, C. Lin, W. Rivera, R.C. Hyer, M. Green, S.C. Sharma, D.R. Chopra, A.R. Chourasia Scanning tunneling microscopy of the electronic structure of chemical vapor deposited diamond films Appl. Phys. Lett. 62, 1889 (1993)
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Gupta, S., John, F., Daghero, D. et al. Investigating point defects in irradiated boron-doped diamond films by temperature-dependent electrical properties and scanning tunneling microscopy and spectroscopy. Journal of Materials Research 25, 444–457 (2010). https://doi.org/10.1557/JMR.2010.0064
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DOI: https://doi.org/10.1557/JMR.2010.0064