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Etching-enhanced Ablation and the Formation of a Microstructure in Silicon by Laser Irradiation in an SF6 Atmosphere

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Abstract

Sequential pulsed-laser irradiation of silicon in SF6 atmospheres induced the formation of an ensemble of microholes and microcones. Profilometry measurements and direct imaging with an intensifying charge-coupled device camera were used to study the evolution of this microstructure and the laser-generated plume. Both the partial pressure of SF6 and the total pressure of an SF6-inert gas mixture strongly influenced the maximum height that the microcones attained over the initial surface. The cones first grew continuously with the number of pulses, reached a maximum, and then began to recede as the number of laser pulses increased further. The growth of the cones was closely connected with the evolution of the laser-generated plume.

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Jesse, S., Pedraza, A.J., Fowlkes, J.D. et al. Etching-enhanced Ablation and the Formation of a Microstructure in Silicon by Laser Irradiation in an SF6 Atmosphere. Journal of Materials Research 17, 1002–1013 (2002). https://doi.org/10.1557/JMR.2002.0148

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  • DOI: https://doi.org/10.1557/JMR.2002.0148

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