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Microstructural evolution of dense and porous pyroelectric Pb1−xCaxTiO3 thin films

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Abstract

Pb1−xCaxTiO3 thin films with x = 0−0.3 for pyroelectric applications were deposited on platinized silicon wafers by chemical solution processing. Ca-substitution for Pb in PbTiO3 results in a reduced c/a ratio of the unit cell, which, in turn, leads to better pyroelectric properties. Control of nucleation and growth during rapid thermal annealing to 650 °C allowed the formation of either highly porous or dense (111) oriented films. The inclusion of pores creates a matrix-void composite with the low permittivity desired for pyroelectric applications, resulting in a high figure of merit. The growth mechanisms for the microstructural evolution of both dense and porous films were analyzed by x-ray diffraction, transmission electron microscopy, scanning electron microscopy, and Rutherford backscattering spectrometry and allowed establishment of microstructure/property relationships.

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Authors and Affiliations

  1. Laboratoire de Céramique, Département des Matériaux, Ecole Polytechnique Fédérale de Lausanne, Lausanne, 1015, Switzerland

    Andreas Seifert, Laurent Sagalowicz, Paul Muralt & Nava Setter

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  1. Andreas Seifert
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  2. Laurent Sagalowicz
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  3. Paul Muralt
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  4. Nava Setter
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Seifert, A., Sagalowicz, L., Muralt, P. et al. Microstructural evolution of dense and porous pyroelectric Pb1−xCaxTiO3 thin films. Journal of Materials Research 14, 2012–2022 (1999). https://doi.org/10.1557/JMR.1999.0272

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  • DOI: https://doi.org/10.1557/JMR.1999.0272

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