Skip to main content
Log in

Pulsed electrodeposition of diamond-like carbon films

  • Articles
  • Published:
Journal of Materials Research Aims and scope Submit manuscript

Abstract

Diamond-like carbon (DLC) films have been prepared by electrolysis of methanol solution using a pulse-modulated source. The deposition rate of the films is enhanced significantly compared to that of dc value. That the films do not contain bonded hydrogen is confirmed by infrared spectra. The structures of the films are characterized by Raman spectroscopy. These films show chemical inertness and hardness values in the range 12.5–19 GPa. Current-voltage characteristics of the films are measured, indicating that the resistivity is in the 107 Ω cm range and the breakdown field is larger than 1 MV cm−1.

This is a preview of subscription content, log in via an institution to check access.

Access this article

Price excludes VAT (USA)
Tax calculation will be finalised during checkout.

Instant access to the full article PDF.

Similar content being viewed by others

References

  1. F. Rossi, B. Andre, A. van Veen, P.E. Mijnarends, H. Schut, M.P. Delplancke, W. Gissler, J. Haupt, G. Lucazeau, and L. Abello, J. Appl. Phys. 75, 3121 (1994).

    Article  CAS  Google Scholar 

  2. Y. Namba, J. Vac. Sci. Technol. A 10, 3368 (1992).

    Article  CAS  Google Scholar 

  3. T. Suzuki, Y. Manita, T. Yamazaki, S. Wada, and T. Noma, J. Mater. Sci. 30, 2067 (1995).

    Article  CAS  Google Scholar 

  4. H. Wang, M.R. Shen, Z.Y. Ning, C. Ye, C.B. Cao, H.Y. Dang, and H.S. Zhu, Appl. Phys. Lett. 69, 1074 (1996).

    Article  CAS  Google Scholar 

  5. A. Hatta, K. Kudata, Y. Mori, T. Ito, T. Sasaki, A. Hiraki, and S. Okada, Appl. Phys. Lett. 66, 1602 (1995).

    Article  CAS  Google Scholar 

  6. Y. Matanabe, M. Shiratani, and H. Makino, Appl. Phys. Lett. 57, 1616 (1990).

    Article  Google Scholar 

  7. B. J. Thaler, J. B. Ketterson, and J. E. Hilliard, Phys. Rev. Lett. 41, 336 (1978).

    Article  CAS  Google Scholar 

  8. U. Cohen, F. B. Koch, and R. Sard, J. Electrochem. Soc. 130, 1987 (1983).

    Article  CAS  Google Scholar 

  9. U. Cohen, K.R. Walton, and R. Sard, ibid. 131, 2489 (1984).

    Article  CAS  Google Scholar 

  10. K. Kondo, M. Yokoyama, and K. Shinohara, J. Electrochem. Soc. 142, 2256 (1995).

    Article  CAS  Google Scholar 

  11. J. C. Angus, Thin Solid Films 216, 126 (1992).

    Article  CAS  Google Scholar 

  12. N-H. Cho, K.M. Krishnan, D.K. Veirs, M. D. Rubin, C.B. Hopper, B. Bhushan, and D. B. Bogy, J. Mater. Res. 5, 2543 (1990).

    Article  CAS  Google Scholar 

  13. B. R. Mehta, E.A. Ogeyzlo, Diamond Relat. Mater. 3, 10 (1993).

    Article  Google Scholar 

  14. B. Dischler, G. Brandt, and P. Koidl, Appl. Phys. Lett. 42, 636 (1983).

    Article  CAS  Google Scholar 

  15. P. Couderc and Y. Catherine, Thin Solid Films 146, 93 (1987).

    Article  CAS  Google Scholar 

  16. A. Richter, H-J. Scheibe, W. Pompe, K-W. Brezeinka, and I. Muhling, J. Non-Cryst. Solids 88, 131 (1986).

    Article  CAS  Google Scholar 

  17. M. Ramsteiner and J. Wagner, Appl. Phys. Lett. 51, 1355 (1987).

    Article  CAS  Google Scholar 

  18. W. S. Bacsa, J.S. Lannin, D. L. Pappas, and J. J. Cuomo, Phys. Rev. B 47, 10931 (1993).

    Article  CAS  Google Scholar 

  19. D. S. Knight and W.B. White, J. Mater. Res. 4, 385 (1989).

    Article  CAS  Google Scholar 

  20. Q. Wang, D.D. Allred, and J. Gonzalez-Hernandez, Phys. Rev. B 47, 6119 (1993).

    Article  CAS  Google Scholar 

  21. I. R. Nicklow, N. Wakabayashi, and H.G. Smith, Phys. Rev. B 5, 4951 (1991).

    Article  Google Scholar 

  22. D. B. Fitchen, Mol. Cryst. Liq. Cryst. 83, 95 (1982).

    Article  Google Scholar 

  23. E. Mulazzi, G. P. Brivio, E. Faulques, and S. Lefrant, Solid State Commun. 46, 851 (1983).

    Article  CAS  Google Scholar 

  24. S. A. Khasawinah, G. Popovici, J. Farmer, T. Sung, M. A. Prelas, J. Chamberlain, and H. White, J. Mater. Res. 10, 2523 (1995).

    Article  CAS  Google Scholar 

  25. R. O. Dillon, J. A. Woollam, and V. Katkanant, Phys. Rev. B 29, 3482 (1984).

    Article  CAS  Google Scholar 

  26. D. Beeman, J. Silverman, R. Lynds, and M. R. Anderson, Phys. Rev. B 30, 870 (1984).

    Article  CAS  Google Scholar 

Download references

Author information

Authors and Affiliations

Authors

Rights and permissions

Reprints and permissions

About this article

Cite this article

Wang, H., Shen, MR., Ning, ZY. et al. Pulsed electrodeposition of diamond-like carbon films. Journal of Materials Research 12, 3102–3105 (1997). https://doi.org/10.1557/JMR.1997.0404

Download citation

  • Received:

  • Accepted:

  • Published:

  • Issue Date:

  • DOI: https://doi.org/10.1557/JMR.1997.0404

Navigation