Abstract
Diamond-like carbon (DLC) films have been prepared by electrolysis of methanol solution using a pulse-modulated source. The deposition rate of the films is enhanced significantly compared to that of dc value. That the films do not contain bonded hydrogen is confirmed by infrared spectra. The structures of the films are characterized by Raman spectroscopy. These films show chemical inertness and hardness values in the range 12.5–19 GPa. Current-voltage characteristics of the films are measured, indicating that the resistivity is in the 107 Ω cm range and the breakdown field is larger than 1 MV cm−1.
Similar content being viewed by others
References
F. Rossi, B. Andre, A. van Veen, P.E. Mijnarends, H. Schut, M.P. Delplancke, W. Gissler, J. Haupt, G. Lucazeau, and L. Abello, J. Appl. Phys. 75, 3121 (1994).
Y. Namba, J. Vac. Sci. Technol. A 10, 3368 (1992).
T. Suzuki, Y. Manita, T. Yamazaki, S. Wada, and T. Noma, J. Mater. Sci. 30, 2067 (1995).
H. Wang, M.R. Shen, Z.Y. Ning, C. Ye, C.B. Cao, H.Y. Dang, and H.S. Zhu, Appl. Phys. Lett. 69, 1074 (1996).
A. Hatta, K. Kudata, Y. Mori, T. Ito, T. Sasaki, A. Hiraki, and S. Okada, Appl. Phys. Lett. 66, 1602 (1995).
Y. Matanabe, M. Shiratani, and H. Makino, Appl. Phys. Lett. 57, 1616 (1990).
B. J. Thaler, J. B. Ketterson, and J. E. Hilliard, Phys. Rev. Lett. 41, 336 (1978).
U. Cohen, F. B. Koch, and R. Sard, J. Electrochem. Soc. 130, 1987 (1983).
U. Cohen, K.R. Walton, and R. Sard, ibid. 131, 2489 (1984).
K. Kondo, M. Yokoyama, and K. Shinohara, J. Electrochem. Soc. 142, 2256 (1995).
J. C. Angus, Thin Solid Films 216, 126 (1992).
N-H. Cho, K.M. Krishnan, D.K. Veirs, M. D. Rubin, C.B. Hopper, B. Bhushan, and D. B. Bogy, J. Mater. Res. 5, 2543 (1990).
B. R. Mehta, E.A. Ogeyzlo, Diamond Relat. Mater. 3, 10 (1993).
B. Dischler, G. Brandt, and P. Koidl, Appl. Phys. Lett. 42, 636 (1983).
P. Couderc and Y. Catherine, Thin Solid Films 146, 93 (1987).
A. Richter, H-J. Scheibe, W. Pompe, K-W. Brezeinka, and I. Muhling, J. Non-Cryst. Solids 88, 131 (1986).
M. Ramsteiner and J. Wagner, Appl. Phys. Lett. 51, 1355 (1987).
W. S. Bacsa, J.S. Lannin, D. L. Pappas, and J. J. Cuomo, Phys. Rev. B 47, 10931 (1993).
D. S. Knight and W.B. White, J. Mater. Res. 4, 385 (1989).
Q. Wang, D.D. Allred, and J. Gonzalez-Hernandez, Phys. Rev. B 47, 6119 (1993).
I. R. Nicklow, N. Wakabayashi, and H.G. Smith, Phys. Rev. B 5, 4951 (1991).
D. B. Fitchen, Mol. Cryst. Liq. Cryst. 83, 95 (1982).
E. Mulazzi, G. P. Brivio, E. Faulques, and S. Lefrant, Solid State Commun. 46, 851 (1983).
S. A. Khasawinah, G. Popovici, J. Farmer, T. Sung, M. A. Prelas, J. Chamberlain, and H. White, J. Mater. Res. 10, 2523 (1995).
R. O. Dillon, J. A. Woollam, and V. Katkanant, Phys. Rev. B 29, 3482 (1984).
D. Beeman, J. Silverman, R. Lynds, and M. R. Anderson, Phys. Rev. B 30, 870 (1984).
Author information
Authors and Affiliations
Rights and permissions
About this article
Cite this article
Wang, H., Shen, MR., Ning, ZY. et al. Pulsed electrodeposition of diamond-like carbon films. Journal of Materials Research 12, 3102–3105 (1997). https://doi.org/10.1557/JMR.1997.0404
Received:
Accepted:
Published:
Issue Date:
DOI: https://doi.org/10.1557/JMR.1997.0404