Skip to main content
Log in

13C NMR investigation of CVD diamond: Correlation of NMR and Raman spectral linewidths

  • Articles
  • Published:
Journal of Materials Research Aims and scope Submit manuscript

Abstract

Six CVD diamond thin films were examined by magic angle spinning (MAS) 13C nuclear magnetic resonance (NMR), Raman, and electron spin resonance spectroscopy. The use of film samples cut to the diameter of the magic-angle spinning rotor provided ease of spinning and the opportunity to obtain good signal-to-noise spectra in 4 to 16 h. MAS NMR linewidths exhibit a linear correlation with Raman linewidths and reflect the optical quality of the material. Residual MAS NMR linewidths most likely arise from a combination of crystal defect sites and paramagnetic effects.

This is a preview of subscription content, log in via an institution to check access.

Access this article

Price excludes VAT (USA)
Tax calculation will be finalised during checkout.

Instant access to the full article PDF.

Institutional subscriptions

Similar content being viewed by others

References

  1. K. M. McNamara, D. H. Levy, K. K. Gleason, and C. J. Robinson, Appl. Phys. Lett. 60, 580 (1992).

    Article  CAS  Google Scholar 

  2. K. M. McNamara, K. K. Gleason, and C. J. Robinson, J. Vac. Sci. Technol. A 10, 3143 (1992).

    Article  CAS  Google Scholar 

  3. D. H. Levy and K. K. Gleason, J. Phys. Chera. 96, 8125 (1992).

    Article  CAS  Google Scholar 

  4. M. J. Duijvestijn, C. van der Lugt, J. Smidt, R. A. Wind, K. W. Zilm, and D. C. Staplin, Chem. Phys. Lett. 102, 25 (1983).

    Article  CAS  Google Scholar 

  5. K.M. McNamara and K.K. Gleason, J. Appl. Phys. 71, 2884 (1992).

    Article  CAS  Google Scholar 

  6. H. Lock, G. E. Maciel, and C. E. Johnson, J. Mater. Res. 7, 2791 (1992).

    Article  CAS  Google Scholar 

  7. H. Lock, R.A. Wind, G.E. Maciel, and C.E. Johnson, J. Chem. Phys. 99, 3363 (1993).

    Article  CAS  Google Scholar 

  8. K. M. McNamara, K. K. Gleason, D. J. Vestyck, and J. E. Butler, Diamond Relat. Mater. 1, 1145 (1992).

    Article  CAS  Google Scholar 

  9. P.M. Henrichs, M.L. Cofield, R.H. Young, and J.M. Hewitt, J. Magn. Reson. 58, 85 (1984).

    CAS  Google Scholar 

  10. Linewidth taken from Ref. 5. This linewidth reflects a magnet inhomogeneity of about 250 Hz (K. Gleason, private communication).

  11. D.S. Knight and W.B. White, J. Mater. Res. 4, 385 (1989), and references therein.

  12. R.E. Shroder, R.J. Nemanich, and J.T. Glass, Phys. Rev. B 41, 3738 (1990), and references therein.

  13. S.A. Solin and A.K. Ramdas, Phys. Rev. B 1, 1687 (1970).

    Article  Google Scholar 

  14. J.W. Alger, D.K. Veirs, and G.M. Rosenblatt, Phys. Rev. B 43, 6491 (1991).

    Article  Google Scholar 

  15. S.C. Sharma, M. Green, R.C. Hyer, C.A. Dark, T.D. Black, A. R. Chourasia, D. R. Chopra, and K. K. Mishra, J. Mater. Res. 5, 2424 (1990).

    Article  CAS  Google Scholar 

  16. L.H. Robins, E.N. Farabaugh, and A. Feldman, J. Mater. Res. 5, 2456 (1990).

    Article  CAS  Google Scholar 

  17. L.H. Robins, A. Feldman, and E.N. Farabaugh, in Diamond Optics V, edited by A. Feldman and S. Holly (Proc. SPIE, 1759, San Diego, CA, 1992), p. 70.

  18. A. M. Bonnot, Phys. Rev. B 41, 6040 (1990).

    Article  CAS  Google Scholar 

  19. J. Wagner, C. Wild, W. Müller-Sebert, and P. Koidl, Appl. Phys. Lett. 61, 1284 (1992).

    Article  CAS  Google Scholar 

  20. S-A. Stuart, S. Prawer, and P.S. Weiser, Appl. Phys. Lett. 62, 1227 (1993).

    Article  CAS  Google Scholar 

  21. L. Bergman, B.R. Stoner, K.F. Turner, J.T. Glass, and R.J. Nemanich, J. Appl. Phys. 73, 3951 (1993).

    Article  CAS  Google Scholar 

  22. S. Karasawa, M. Mitsuhashi, S. Ohya, K. Kobayashi, T. Watanabe, K. Hirai, K. Horiguchi, and F. Togashi, J. Cryst. Growth 128, 403 (1993).

    Article  CAS  Google Scholar 

  23. M. Yoshikawa, Y. Mori, M. Maegawa, G. Katagiri, H. Ishida, and A. Ishitani, Appl. Phys. Lett. 62, 3114 (1993).

    Article  CAS  Google Scholar 

  24. M. Mitsuhashi, S. Karasawa, S. Ohya, and F. Togashi, Thin Solid Films 228, 76 (1993).

    Article  CAS  Google Scholar 

Download references

Author information

Authors and Affiliations

Authors

Rights and permissions

Reprints and permissions

About this article

Cite this article

Merwin, L.H., Johnson, C.E. & Weimer, W.A. 13C NMR investigation of CVD diamond: Correlation of NMR and Raman spectral linewidths. Journal of Materials Research 9, 631–635 (1994). https://doi.org/10.1557/JMR.1994.0631

Download citation

  • Received:

  • Accepted:

  • Published:

  • Issue Date:

  • DOI: https://doi.org/10.1557/JMR.1994.0631

Navigation