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Thin-film reactions of Au with Ti, Zr, V, and Nb

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Abstract

The thin-film interactions of Au with Ti, Zr, V, and Nb have been investigated between 350C and 700°C with Rutherford backscattering spectroscopy (RBS) and x-ray diffraction (XRD). Initially the most Au-rich phase is formed, except. with V, and it is followed sequentially by the more metal-rich ones in an increasingly layer-by-layer fashion. For Au reactions on Ti and Nb, all the intermetallic phases on the phase diagrams were observed. In the formation of Au4Ti, Au is the dominant moving species.

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References

  1. K. N. Tu and J. W. Mayer, in Thin FilmsInterdiffusion and Reactions, edited by J. M. Poate, K. N. Tu, and J. W. Mayer (Wiley, New York, 1978), Chap. 10.

    Google Scholar 

  2. S. P. Murarka, Suicides for VLSI Applications (Academic, New York, 1983).

    Google Scholar 

  3. M.-A. Nicolet and S. S. Lau, in VLSI Electronics; Microstructure Science, edited by N. G. Einspruch and G. B. Larrabee (Academic, New York, 1983), Vol. 6, Chap. 6.

    Google Scholar 

  4. J. E. E. Baglin and J. M. Poate, in Ref. 1, Chap. 9.

  5. S. U. Campisano, in Thin Film Phenomena: Interfaces and Interactions, edited by J. E. E. Baglin and J. M. Poate (Electrochemical Society, Princeton, NJ, 1978), p. 129.

    Google Scholar 

  6. E. C. Colgan, M. Nastasi, and J. W. Mayer, J. Appl. Phys. 58, 4125 (1985).

    Article  CAS  Google Scholar 

  7. E. G. Colgan and J. W. Mayer, in Thin FilmsInterfaces and Phenomena, edited by R. J. Nemanich, P. S. Ho, and S. S. Lau (North-Holland, New York, 1986), p. 121.

    Google Scholar 

  8. E. G. Colgan and J. W. Mayer, Nucl. Instrum. Methods B 17, 242 (1986).

    Article  Google Scholar 

  9. T. C. Tisone and J. Drobek, J. Vac. Sci. Technol. 9, 271 (1972).

    Article  CAS  Google Scholar 

  10. J. M. Poate, P. A. Turner, and W. J. DeBonte, J. Appl. Phys. 46, 4275 (1975).

    Article  CAS  Google Scholar 

  11. A. Christou and H. Day, J. Appl. Phys. 44, 3386 (1973).

    Article  CAS  Google Scholar 

  12. T. C. Tisone and S. S. Lau, J. Appl. Phys. 45, 1667 (1974).

    Article  CAS  Google Scholar 

  13. J.-W. Liaw, Y.-C. Liu, J.-S. Maa, W.-S. Hsu, W.-J. Shen, and S. K. Hsiung, Ts’ai Liao K’o Hsueh 12, 36 (1980).

    Google Scholar 

  14. P. Villars and L. D. Calvert, Pearson’s Handbook of Cryrstallographic Data for Intermetallic Phases (American Society for Metals, Metals Park, OH, 1985).

    Google Scholar 

  15. L. R. Doolittle, Nucl. Instrum. Methods B 9, 344 (1985).

    Article  Google Scholar 

  16. The stopping power data came from: J. F. Ziegler, J. P. Biersack, and U. Littmark, IBM Research Report No. RC9250, 1982.

  17. . L. Murray, Bull. Alloy Phase Diagrams 4, 278 (1983).

    Article  Google Scholar 

  18. T. B. Massalski, H. Okamoto, and J. P. Abriata, Bull. Alloy Phase Diagrams 6, 519 (1985).

    Article  CAS  Google Scholar 

  19. J. F. Smith, Bull. Alloy Phase Diagrams 2, 344 (1981).

    Article  Google Scholar 

  20. H. Okamoto and T. B. Massalski, Bull. Alloy Phase Diagrams 6, 134 (1985).

    Article  CAS  Google Scholar 

  21. R. W. Bené, Appl. Phys. Lett. 41, 529 (1982).

    Article  CAS  Google Scholar 

  22. The correction to the rule is a private communication from R. W. Bené.

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Colgan, E.G., Mayer, J.W. Thin-film reactions of Au with Ti, Zr, V, and Nb. Journal of Materials Research 2, 28–34 (1987). https://doi.org/10.1557/JMR.1987.0028

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  • DOI: https://doi.org/10.1557/JMR.1987.0028

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