Abstract
Using a material synthesis technique to optimize the coverage of metals on the surface of silicon, the iron-promoted nitridation of high-purity silicon was studied. The kinetic results indicated that conversions to silicon nitride were directly dependent upon the surface loading by iron up to the point of excess coverage where the rates dropped sharply. A further modification of the iron-promoted system by alkali and alkaline earth metals sharply increased the degree of conversion. The results suggested that the chief effect of the metal promotion was to reduce nitridation induction times and to disrupt the oxided silicon surface. Reaction rates were enhanced by the iron promoter to the extent that the silicon surface was covered and deoxidized by iron.
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Moser, W.R., Briere, D.S., Correia, R. et al. Kinetics of iron-promoted silicon nitridation. Journal of Materials Research 1, 797–802 (1986). https://doi.org/10.1557/JMR.1986.0797
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DOI: https://doi.org/10.1557/JMR.1986.0797