Abstract
We present the first known systematic mapping of quantum well and tunnel barrier thicknesses in a resonant tunneling structure by transport measurements. The technique derives a 1 Å averaged resolution for quantum well and barrier thicknesses, independently for the quantum well and adjacent tunnel barriers. Contour maps of the structure reveal an asymmetric shallow ring growth structure for one of the epilayers. Current-voltage characteristics and temperature dependence of the resonant tunneling structures will also be discussed.
Similar content being viewed by others
References
L. L. Chang, L. Esaki, and R. Tsu, Appl. Phys. Lett. 24, 593 (1974).
T. C. L. G. Sollner, W. D. Goodhue, P. E. Tannenwald, C. D. Parker, and D. D. Peck, Appl. Phys. Lett. 43, 588 (1983).
A. R. Bonnefoi, R. T. Collins, T. C. McGill, R. D. Burnham, and F. A. Ponce, Appl. Phys. Lett. 46, 285 (1985).
T. J. Shewchuk, P. C. Chapin, P. D. Coleman, W. Kopp, R. Fisher, and H. Morkç, Appl. Phys. Lett. 46, 508 (1985).
T. C. L. G. Sollner, H. Q. Le, C. A. Correa, and W. D. Goodhue, Appl. Phys. Lett. 45, 1319 (1984).
R. Tsu and L. Esaki, Appl. Phys. Lett. 22, 562 (1973).
J. G. Simmons, J. Appl. Phys. 34, 1793 (1963).
B. Ricco and M. Ya Azbel, Phys. Rev. B 29, 1970 (1984).
S. Luryi, Appl. Phys. Lett. 47, 490 (1985).
A. Y. Cho and K. Y. Cheng, Appl. Phys. Lett. 38, 360 (1981).
A. R. Bonnefoi, T. C. McGill, and R. D. Burnham, Appl. Phys. Lett. 47, 307 (1985).
The largest lateral distance between data points of Ref. 11 is 16% of the larger cleaved side of Fig. 3.
Following submission of this paper, a value of 2.2:1 was reported (H. Sakaki, 1985 IEDM Tech. Dig.).
Author information
Authors and Affiliations
Rights and permissions
About this article
Cite this article
Reed, M.A., Lee, J.W., Aldert, R.K. et al. Investigation of quantum well and tunnel barrier growth by resonant tunneling. Journal of Materials Research 1, 337–342 (1986). https://doi.org/10.1557/JMR.1986.0337
Received:
Accepted:
Published:
Issue Date:
DOI: https://doi.org/10.1557/JMR.1986.0337