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Amorpiious Silicon Thin Film Transistor and its Applications to Large-Area Electironics

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In this paper, the amorphous silicon thin film transistor (a-Si:HTFT) technology is reviewed. Its applications to both one- and two-dimensional large-area devices are described. The issues related to the fabrication of TFT arrays on large-area substrates are also discussed.

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  1. Xerox Palo Alto Research Center, Palo Alto, CA, 94304, USA

    H. C. Tuan

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  1. H. C. Tuan
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Tuan, H.C. Amorpiious Silicon Thin Film Transistor and its Applications to Large-Area Electironics. MRS Online Proceedings Library 33, 247–257 (1984). https://doi.org/10.1557/PROC-33-247

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  • DOI: https://doi.org/10.1557/PROC-33-247

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