Abstract
Infrared absorption data of various Si:H samples involving several series of a-Si:H films as well as fuc-Si:H and c-Si:H samples were analyzed to obtain ratios of the absorption strengths A of the Si-H stretching modes at 2000 and 2100 cm-1 and of the Si-H wagging mode at 640 cm-1. Hydrogen effusion measurements were used to obtain the absolute values of A. The results suggest essentially equal absorption strengths for the two Si-H stretching modes and a ratio of wagging and stretching absorption strengths independent of hydrogen density NH. Films with predominant 2100 cm-1stretching absorption show a stronger sample dependence of A than observed for samples with predominant 2000 cm-1absorption. A slight increase of the absorption strength of the Si-H wagging and stretching modes with rising hydrogen concentration is observed for a-Si:H films and is attributed to the decrease of the refractive index. Enhanced A values of fuc-Si:H samples compared to a-Si:H samples point to the presence of molecular hydrogen.
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References
A.H. Mahan, P. Raboisson, D.L. Williamson and R. Tsu, Solar Cells 21, 117 (1987).
J. Daey Ouwens and R.E.I. Schropp, Mat. Res. Soc. Symp. Proc. 377, 419 (1995).
G. Lucovsky, R.J. Nemanich, and J.C. Knights, Phys. Rev B 19, 2064 (1979).
M. Cardona, Phys. Stat. Sol. B 118, 463 (1983).
H. Wagner and W. Beyer, Solid State Commun. 71, 585 (1983).
E.C. Freeman and W. Paul, Phys. Rev. B 18, 4288 (1978).
C.J. Fang, K.J. Gruntz, L. Ley, M. Cardona, F.J. Demond, G. Müller and S. Kalbitzer, J. Non-Cryst. Solids 35-36, 255 (1980).
A.A. Langford, M.L. Fleet, B.P. Nelson, W.A. Lanford and N. Maley, Phys. Rev. B 45, 13367 (1992).
C. Manfredotti, F. Fizzotti, M. Boero, P. Pastorino, P. Polesello and E. Vittone, Phys. Rev. B 50, 18047 (1994).
H. Shanks, C.J. Fang, L. Ley, M. Cardona, F.J. Demond and S. Kalbitzer, Phys. Status Solidi B 106, 43 (1980).
W. Beyer, P. Hapke and U. Zastrow, Mat. Res. Soc. Symp. Proc. 467, 343 (1997).
W. Beyer and U. Zastrow, J. Non-Cryst. Solids (Proceed. ICAMS 1997), in print.
W. Beyer, J. Herion, H. Wagner and U. Zastrow, Philos. Mag. B 63, 269 (1991).
S. Basrour, J.C. Bruyere, E. Bustarret, C. Gotet, J.P. Stoquert, G. Sardin, Proceedings 9th European Photovoltaic Solar Energy Conference, Freiburg, Germany (Kluwer Academic, Dordrecht, Netherlands, 1989), p. 1010.
D. Gracin, U.V. Desnica, and M. Ivanda, J. Non-Cryst. Solids 149, 257 (1992).
J. Daey Ouwens, R.E.I. Schropp and W.F. van der Weg, Appl. Phys. Lett. 65,204 (1994).
J. Tatarkiewicz, Solid State Phenomena 1-2, 457 (1988).
P. John, I.M. Odeh, M.J.K. Thomas, M.J. Tricker, J.I.B. Wilson, J.B.A. England and D. Newton, J. Phys. C 14, 309 (1981).
G.A.N. Connell and J.R. Pawlik, Phys. Rev. B 13, 787 (1976).
M.H. Brodsky, M. Cardona and J.J. Cuomo, Phys. Rev. B 16, 3556 (1977).
L. Ley, J. Reichardt and R.L. Johnson, Phys. Rev. Lett. 49, 1664 (1982).
U. Kroll, J. Meier, A. Shah, S. Mikhailov and J. Weber, J. Appl. Phys. 80, 4971 (1996).
Acknowledgement
Financial support by BMBF, technical assistance by F. Pennartz, R. Schmitz, R. von de Berg and stimulating discussions with F. Finger, J. F6lsch and H. Wagner are gratefully acknowledged.
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Beyer, W., Abo Ghazala, M.S. Absorption Strengths of Si-H Vibrational Modes in Hydrogenated Silicon. MRS Online Proceedings Library 507, 601–606 (1998). https://doi.org/10.1557/PROC-507-601
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DOI: https://doi.org/10.1557/PROC-507-601