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Growth of (001)-Oriented Sbn Thin Films by Solid Source MOCVD

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Abstract

By the solid source MOCVD technique, we have deposited 2000 - 3000 Å thick single phase SrxBa1−xNb2O6 (SBN) films on (100) MgO substrates using tetramethylheptanedionate (thd) sources. X-ray diffraction (XRD) 2θ scans indicated that these films were completely (001) oriented. XRD Φ scans, however, showed the films contained four in-plane grain orientations whose volume fractions could be controlled by altering the Sr/(Sr+Ba) and Nb/(Sr+Ba) ratios in the source powders. The in-plane volume fractions did not change with the deposition rate or the cooling rate. Films with composition Sr0 58Ba0.42Nb1.94O6 had mainly two in-plane orientations. Optical waveguiding behavior was demonstrated in these films. Refractive indices were found to be no= 2.20 and ne = 2.13, as compared to no = 2.31 and ne = 2.27 for bulk SBN60.

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Authors and Affiliations

  1. Materials Science and Engineering Department, Stanford University, CA, 94305-2205, USA

    Z. Lu & R. S. Feigelson

  2. Center for Materials Research, Stanford University, CA, 94305-4045, USA

    R. K. Route

  3. Hewlett-Packard Corporation, 3500 Deer Creek Road, Palo Alto, CA, 94303, USA

    R. Hiskes & S. A. Dicarolis

Authors
  1. Z. Lu
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  2. R. S. Feigelson
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  3. R. K. Route
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  4. R. Hiskes
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  5. S. A. Dicarolis
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Lu, Z., Feigelson, R.S., Route, R.K. et al. Growth of (001)-Oriented Sbn Thin Films by Solid Source MOCVD. MRS Online Proceedings Library 335, 59–64 (1993). https://doi.org/10.1557/PROC-335-59

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  • DOI: https://doi.org/10.1557/PROC-335-59

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