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Modelling electromigration and induced stresses in Aluminum lines

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Abstract

The various equations used by different authors for describing electromigration are compiled. All of them can be derived from a general equation which is based on a vacancy model. During the derivation of simplified versions of the general equations assumptions have to be made and their effect on concentration profiles and/or electromigration stresses developing as a function of time are discussed. Consequences with respect to Blech's experiment or the current exponent in Black's equation are taken into consideration and a simple explanation is provided for the beneficial effect of a (111) texture on the reliability of Al-lines.

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Authors and Affiliations

  1. Max-Planck-Institut für Metallforschung, Institut für Werkstoffwissenschaft, Seestr. 92, D-7000, Stuttgart-1, Germany

    R. Kirchheim

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  1. R. Kirchheim
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Kirchheim, R. Modelling electromigration and induced stresses in Aluminum lines. MRS Online Proceedings Library 309, 101–110 (1993). https://doi.org/10.1557/PROC-309-101

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  • DOI: https://doi.org/10.1557/PROC-309-101

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