Abstract
We report on a study of hard amorphous carbon thin films prepared by condensing streams of energetic carbon species, onto a range of substrates maintained at different temperatures. The carbon vapor is generated either by ion sputtering, laser ablation or e-beam evaporation. Spatially resolved electron-energy-loss spectra reveal variations in the films'. microstructure brought about by altering the deposition conditions. We estimate that the density of the different films varies between 2.0 and 3.26 g/cm3. We observe an evolution towards denser films upon increasing incident beam energy, reducing substrate temperature, and increasing substrate thermal conductivity. Low density films contain a predominance of trigonally bonded sp2-hybridized carbon (i.e graphitic carbon) and the highest density films contain a high fraction (~80%) of tetr-ahedral sp3-bonded carbon (i.e. diamond-like).
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References
1_J. C Angus and F. Jansen, J. Vac Sci. and Tech. A61778 (1988)
2_J. C. Angus and C. C. Haymen, Science 241 913 (1988)
3_H. Tsai and D. B. Bogy, J. Vac. Sci. Technol. A5, 3287 (1987)
4_R Messier, A. R. Badzian, T. Badzian, K. E. Spear, P. Bachman, and R. Roy, Thin Solid Films, 153, 1 (1987)
5_J. Robertson, Advances in Physics, 35, 317 (1986)
6_J. Bruley, P. B. Madakson, J. C. Liu, Nuc. Instrum. and Meth. in Phys., B45, 618 (1990)
7_C. Gao, Y. Y. Wang, A. L. Ritter and J. R. Dennison, Phys Rev. Letts., 62, 945 (1989)
8_G. Comelli, J. Stohr, C. J. Robinson, and W. Jark, Phys. Rev. B38, 7511, (1988)
9_J. J. Cuomo, J. P Doyle, J. Bruley, J. C. Liu, Carbon 28 761 (1990); Appl Phys Letts 58 1 (1991)
10_ A review is given by C. Colliex in Advances in Optical and Electron Microscopy, Edited by R. Barer and V. E. Cosslet (Academic Press, New York), Vol. 9, 65 (1984)
11_D. L. Pappas, K. L. Saenger, J.J. Cuomo, In preparation
12_P. E. Batson, Rev. Sci. Inst. 57, 43 (1986)
13_X. Weng, P. Rez, and H. Ma, Phys Rev B40, 4175, (1989)
14_E. Mele and J. J. Ritsko, Phys Rev Lett. 43, 68 (1979)
15_M. Kitamura, C Sugiura, and S. Muramatsu, Solid State Commun. 62 663 (1987)
16_J. Robertson, Phil. Mag. Letts. 57, 143 (1988)
17_M. A. Tamor and C. H. Wu, J. Appl. Phys. 67, 1007 (1990)
18_Y. Lifshitz, S. R. Kasi, and J. W. Rablais, Phys Rev Lett. 62, 1260 (1989)
19_S. R. Kasi, H. Kang, and J. W. Rabalais, J. Chem. Phys., 88, 5914 (1988)
20_T. Myazawa, S. Misawa, S. Yoshida, and S. Gonda, J. Appl. Phys. 55, 188 (1984)
21_S. Aisenberg and R. Chabot., J. Appl. Phys. 42, 2953, (1971)
22_P. J. Martin, S. W. Filipckuk, R. P. Netterfield, S.J. Field, D. F. Whitnall, and D. R. McKenzie, Mater. Sci. Letts., 7, 410 (1988)
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Cuomo, J.J., Bruley, J., Doyle, J.P. et al. The Effects of Substrate Conditions on the Microstructural Evolution of Thin Diamond-Like Films. MRS Online Proceedings Library 202, 247–252 (1990). https://doi.org/10.1557/PROC-202-247
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DOI: https://doi.org/10.1557/PROC-202-247