Skip to main content
SpringerLink
Log in

Study of Thermodynamic Phase Stability of Intermetallic Thin Films of Pt2Ga, Ptga and PtGa2 on Gallium Arsenide

  • Article
  • Published:
MRS Online Proceedings Library Aims and scope

Abstract

Epitaxial thin films of three different Pt-Ga intermetallic compounds have been grown on GaAs by molecular beam epitaxy (MBE). The resultant films have been annealed at various temperatures and then examined using X-ray two-theta diffraction. Both PtGa2 and PtGa thin films are chemically stable on GaAs under 1 atmosphere of N2 up to 450°C and 600°C, respectively. Thin films of Pt2Ga react with GaAs at temperatures as low as 200°C to form phases with higher Ga concentration.

This is a preview of subscription content, log in via an institution to check access.

Access this article

Log in via an institution

Price excludes VAT (USA)
Tax calculation will be finalised during checkout.

Instant access to the full article PDF.

Institutional subscriptions

Similar content being viewed by others

References

  1. L. J. Brillson, J. Phys. Chem. Solids 44, 703 (1983).

    Article  CAS  Google Scholar 

  2. A. K. Sinha and J. M. Poate, in Thin Films-Interdiffusion and Reactions, edited by J. M. Poate, K. N. Tu and J. W. Mayor (Inter-science, New York, 1978), chap. 11.

  3. L. J. Brillson, Surf. Sci. Rep. 2, 123 (1982).

    Article  CAS  Google Scholar 

  4. C. T. Tsai and R. S. Williams, unpublished.

  5. S. Kim, L. Hsu and R. S. Williams, Phys. Rev. B 36, 3099, (1987).

    Article  CAS  Google Scholar 

  6. JCPDS, Powder Diffraction File: Inorganic Phases (1987). International Center for Diffraction Data.

  7. E. Hellner and F. Laves, Z. Naturforsch., 2a, 1947, 177–183.

    Article  CAS  Google Scholar 

  8. Young K. Kim, David K. Shuh, R. S. Williams, Larry P. Sadwick and Kang L. Wang, unpublished.

Download references

Author information

Authors and Affiliations

  1. Department of Chemistry and Biochemistry and Solid State Science Center, University of California, Los Angeles, 90024-1569, California, USA

    Young K. Kim, David K. Shuh & R. Stanley Williams

  2. Department of Electrical Engineering Device Research Laboratory, University of California, Los Angeles, 90024, California, USA

    Larry P. Sadwick & Kang L. Wang

Authors
  1. Young K. Kim
    View author publications

    You can also search for this author in PubMed Google Scholar

  2. David K. Shuh
    View author publications

    You can also search for this author in PubMed Google Scholar

  3. R. Stanley Williams
    View author publications

    You can also search for this author in PubMed Google Scholar

  4. Larry P. Sadwick
    View author publications

    You can also search for this author in PubMed Google Scholar

  5. Kang L. Wang
    View author publications

    You can also search for this author in PubMed Google Scholar

Rights and permissions

Reprints and permissions

About this article

Cite this article

Kim, Y.K., Shuh, D.K., Williams, R.S. et al. Study of Thermodynamic Phase Stability of Intermetallic Thin Films of Pt2Ga, Ptga and PtGa2 on Gallium Arsenide. MRS Online Proceedings Library 148, 15–20 (1989). https://doi.org/10.1557/PROC-148-15

Download citation

  • Published:

  • Issue Date:

  • DOI: https://doi.org/10.1557/PROC-148-15

Search

Navigation