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Microstructural and Ferroelectric Properties of a Chemical Solution Deposited Epitaxial PbZr0.5 Ti0.5O3 Thin Film on a SrRuO3/SrTiO3 Substrate

  • Journal of Materials Research
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Abstract

Epitaxial PbZr0.5Ti0.5O3 (PZT) thin films were grown on top of a SrRuO3 epitaxial electrode layer on a (100) SrTiO3 substrate by the chemical solution deposition method at 600 °C. The microstructure of the PZT thin film was investigated by x-ray diffraction and transmission electron microscopy, and the ferroelectric properties were measured using the Ag/PZT/SRO capacitor structure. The PZT thin film has the epitaxial orientational relationship of (001) [010]PZT ║ (001) [010]SRO ║ (001) [010]STO with the substrate. The remnant (Pr) and saturation polarization (Ps) density were measured to be Pr ~ 51.4 µC/cm2 and Ps ~ 62.1 µC/cm2 at 5 V, respectively. Ferroelectric fatigue measurements show that the net-switching polarization begins to drop (to 98% of its initial value) after 7 × 108 cycles.

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Author notes

  1. J. H. Kim

    Present address: Department of Inorganic Material Engineering, Chonnam National University, 300 Yongbong-Dong, Puk-Gu, Kwangju, 500-757, South Korea

Authors and Affiliations

  1. Materials Department and Materials Research Laboratory, College of Engineering, University of California, Santa Barbara, California, 93106, USA

    J. H. Kim, A. T. Chien & F. F. Lange

  2. Solid State Technology Laboratory, Solid State Materials Department, Hewlett-Packard Labs, 3500 Deer Creek Rd., 26M-7, Palo Alto, California, 94304, USA

    L. Wills

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  1. J. H. Kim
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  2. A. T. Chien
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  3. F. F. Lange
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  4. L. Wills
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Kim, J.H., Chien, A.T., Lange, F.F. et al. Microstructural and Ferroelectric Properties of a Chemical Solution Deposited Epitaxial PbZr0.5 Ti0.5O3 Thin Film on a SrRuO3/SrTiO3 Substrate. Journal of Materials Research 14, 1190–1193 (1999). https://doi.org/10.1557/JMR.1999.0160

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  • DOI: https://doi.org/10.1557/JMR.1999.0160

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