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Tekhnologiya i Konstruirovanie v Elektronnoi Apparature, 2019, no. 5-6, pp. 3-7.
DOI: 10.15222/TKEA2019.5-6.03
UDC 625.315.592
Measuring system for testing electrical parameters of EMCCDs of various formats
(in English)
Zabudsky V.1, Golenkov O.1, Rikhalsky O.2, Reva V.1, Korinets S.1, Dukhnin S.1, Mytiai R.

Ukraine, Kyiv, 1Institute of Semiconductor Physics of NASU, 2Bogomolets Institute of Physiology of NASU.

This article describes the developed equipment that allows measuring the photoelectrical parameters of multielement photodetectors, specifically various formats of EMCCD (electron multiplying charge-coupled device) chips. The authors present the measuring techniques and test results on dark currents, output amplifier sensitivity, charge transfer efficiency, charge capacity and other parameters. The studies were conducted, both on the wafer and in the body, on samples of the following formats: 576×288, 640×512, 768×576, 1024×1024, and 1280×1024.

Keywords: photodetectors, EMCCD, electron multiplying charge-coupled device, measuring system, photoelectric parameters.

Received 20.11 2019
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