表面科学
Online ISSN : 1881-4743
Print ISSN : 0388-5321
ISSN-L : 0388-5321
Si酸化過程研究へのSR光利用の試み
中沢 正敏川瀬 進関山 秀雄
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ジャーナル フリー

1988 年 9 巻 6 号 p. 446-451

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Some experimental results of solid surface studies using synchrotron radiation are described. Experiments were carried out with the light monochromatized by a grazing incidence monochromator at the BL 8A the Photon Factory. As a result, photoemission spectroscopy with an energy resolution of 0.3 eV has been achieved. Using this method, oxidation process of Si (100) surface has been examined. The results of SEXAFS and XANES for various oxide compounds are also presented.

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