表面科学
Online ISSN : 1881-4743
Print ISSN : 0388-5321
ISSN-L : 0388-5321
特集:ダイヤモンド表面・界面研究の最前線
リンドープCVDダイヤモンドの表面電子エネルギー状態と電子放出
河野 省三
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2008 年 29 巻 3 号 p. 173-180

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Phosphorous (P)-doped CVD diamonds are expected to be good n-type semiconductor diamonds. However, the resistivity of P-doped intrinsic diamonds is very high due to a large ionization energy of impurity phosphorus. When phosphorus is doped in a large amount (≥∼1020cm−3), the resistivity reduces with a pseudo-n-type conductivity at temperatures above 400 K. These intrinsic n-type and pseudo-n-type P-doped diamond single crystal surfaces have been studied recently by electron spectroscopic methods. The surface electronic energy states of both intrinsic n-type and pseudo-n-type diamond surfaces have been examined by electron spectroscopic methods. The mechanism of field emission from the pseudo-n-type diamond surface has been elucidated.

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この記事はクリエイティブ・コモンズ [表示 - 非営利 4.0 国際]ライセンスの下に提供されています。
https://creativecommons.org/licenses/by-nc/4.0/deed.ja
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