Magnetic Lenz lenses improve the limit-of-detection in nuclear magnetic resonance
Fig 5
Fabrication steps of the double Lenz lens chips.
(a) Au-electroplating of lenses on two glass substrates. (b) Lamination and structuring of dry film photoresist on first wafer. (c) UV-laser drilling of microfluidic ports into second wafer. (d) Adhesive full-wafer bonding of both substrates. (e) Dicing of individual chips.