Advances in On-Chip Polymer Optics for Optofluidics

Jessica Godin; Yu-Hwa Lo

doi:10.1364/CLEO.2009.CTuD3

Conference on Lasers and Electro-Optics/International Quantum Electronics Conference
OSA Technical Digest (CD) (Optica Publishing Group, 2009),
paper CTuD3
•https://doi.org/10.1364/CLEO.2009.CTuD3

Advances in On-Chip Polymer Optics for Optofluidics

Jessica Godin and Yu-Hwa Lo

Conference on Lasers and Electro-Optics 2009

Baltimore, Maryland United States
31 May–5 June 2009
ISBN: 978-1-55752-869-8

From the session
Optofluidics for Biosensing and Analysis CLEO Symposium I: Novel Optical Devices and Systems (CTuD)

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J. Godin and Y. Lo, "Advances in On-Chip Polymer Optics for Optofluidics," in Conference on Lasers and Electro-Optics/International Quantum Electronics Conference, OSA Technical Digest (CD) (Optica Publishing Group, 2009), paper CTuD3.

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Abstract

We present liquid-turned-solid lenses (∆n~1.2) in polymer devices replicated from cryogenically-etched silicon molds, with estimated per surface losses of.2–.4 dB. The process creates optical-quality sidewalls (σ_RMS ~ 30 nm) needed for sensitive optofluidic devices.

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