Abstract

Weighted averaging of a sequence of phase-shifted interference patterns yields a fringe-free intensity image that can be useful for machine vision, lateral metrology, defect detection, and other supplementary tasks in a surface-profiling interferometer. Coefficients for effective fringe-removal algorithms follow from a Fourier analysis of phase-shifting errors. Theoretical and experimental examples illustrate the substantially improved performance of a well-designed weighted average over a simple linear sum of data frames.

© 2005 Optical Society of America

Derivation of algorithms for phase-shifting interferometry using the concept of a data-sampling window

Peter de Groot
Appl. Opt. 34(22) 4723-4730 (1995)

Suppressing phase errors from vibration in phase-shifting interferometry

Leslie L. Deck
Appl. Opt. 48(20) 3948-3960 (2009)

Three-dimensional profiling with binary fringes using phase-shifting interferometry algorithms

Gastón A. Ayubi, J. Matías Di Martino, Julia R. Alonso, Ariel Fernández, César D. Perciante, and José A. Ferrari
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Phase-shifting interferometry by a covariance-based method

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Appl. Opt. 44(27) 5778-5785 (2005)

Interframe intensity correlation matrix for self-calibration in phase-shifting interferometry

Hae Young Yun and Chung Ki Hong
Appl. Opt. 44(23) 4860-4869 (2005)