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Publicly Available Published by De Gruyter January 1, 2009

From molecules to particles in silane plasmas

  • A. A. Howling , C. Courteille , J.-L. Dorier , L. Sansonnens and Ch. Hollenstein

Abstract


Conference

International Symposium on Plasma Chemistry, International Symposium on Plasma Chemistry, ISPC, Plasma Chemistry, 12th, Minneapolis, USA, 1995-08-21–1995-08-26


Published Online: 2009-01-01
Published in Print: 1996-01-01

© 2013 Walter de Gruyter GmbH, Berlin/Boston

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