Geckos have a large number of fine hairs on their feet. The fine hair structure enables it to walk on the wall. Since this principle is easy to attach and detach and does not stain the bonded surface, research has been carried out to replicate this principle on an industrial scale. In this study, we adopted a method of reproducing the hairs by fabricating a matrix model using a three-dimensional optical lithography system and transferring them by UV nanoimprinting. The conventional UV nanoimprinting method has the problem of insufficient transfer to the tips of fine hairs. Therefore, in this paper, we performed UV nanoimprinting under a cohesive gas atmosphere to improve the transferability of fine hairs.