A highly precise positionning actuator for a Scanning Prove Microscopes (SPM) and a magnetic recording evaluation system was developed. The positionning actuator was consisted of a displacement amplitude mechanism and a stacked piezoelectric element (PE). In this paper, we propose a new X-Y plane positioning actuator composed of two pair of tracking actuator, parallel link with square support spring and positioning stage we mesured. The control performance and the plane positioning accuracy to be verified. Furthermore, the influence of the tracking actuator on the transient response and the out of plane moment of the PE precise positioning stage has be discussed.
