Lithium ion batteries (LIB) have emerged as one of the most important power sources due to their high specific energy and good cycle stability. Safety of the batteries has been becoming an important issue with the progress of their performance. However, it is basically difficult to realize high safety in current lithium-ion batteries because of the use of liquid electrolytes including flammable organic solvents, which also demands the massive battery package to avoid the electrolyte leakage. Therefore, the replacement of liquid electrolytes with solid electrolytes is an important issue to contribute the improvement safety of lithium-ion batteries. One of the solid electrolytes of interest has been the garnet ceramic Li₇La₃Zr₂O₁₂ (LLZ). It is because of its high ionic conductivity, high chemical stability, and wide potential window. In preparation of all solid state batteries with LLZ, high temperature heating process is commonly used to introduce good interfacial contact. However, this process causes interfacial reactant that cathode/electrolyte interfacial electrical resistance becomes higher. Avoiding high temperature process, the above problem may be overcome. In this study, we focus spray pyrolysis deposition (SPD) technology. SPD is one of low temperature synthesis methods. By using the method, a LLZ film was prepared on glass and evaluated surface morphology and electrochemical properties. Next, LiCoO₂ (LCO)/LLZ/Li all solid state batteries were prepared with SPD and electrochemically evaluated by a constant current (CC) testing method.