Charge State Dependence of Proton Sputtering from Solid Surfaces with Slow Highly Charged Ions

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Published under licence by IOP Publishing Ltd
, , Citation K Kuroki et al 1999 Phys. Scr. 1999 557 DOI 10.1238/Physica.Topical.080a00557

1402-4896/1999/T80B/557

Abstract

Proton sputtering from an uncleaned surface of a CuO mesh has been experimentally studied for very slow highly charged ions of 500 eV Neq+ (q = 4–8), Arq+ (q = 4–13), Krq+ (q = 5–17) and Xeq+ (q = 7–24). It is found that (i) for q < = 10, the sputtering yield of protons showed a power-law dependence (~qγ) with an exponent of γ = 5±1 for all ions measured, and (ii) for q < 10, the yield saturated and deviated from the power law. Such a characteristic feature has been reproduced well by a model based on the classical over-barrier model.

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10.1238/Physica.Topical.080a00557