ABSTRACT
Imaging and structural analysis of nanostructures by electron-optical microscopy were considered in Chapter 2 in the context of the wave-like character of electrons. In this chapter, the particle-like character of electrons will be more appropriate for a discussion of analytical techniques that are commonly associated with electron microscopy. In particular, it will be seen that energy dispersive spectroscopy (EDS) and electron energy loss spectroscopy (EELS) can offer information on composition and chemistry (i.e., electronic structure) with near-atomic resolution. There are several excellent texts that describe the principles and practice of EDS (Russ 1984; Williams, Goldstein, and Newbury 1995; Goldstein et al. 1992), although the emphasis in the literature has tended to be on EDS in combination with SEM, or on WDS (wave-length dispersive spectroscopy) as carried out with an electron microprobe instrument. Here the emphasis will be on EDS in combination with TEM and STEM. The monograph literature on EELS is rather more sparse (Brydson 2001; Ahn 2004; Egerton 2009).
