Precise Nanoscale Measurements with Scanning Probe Microscopy (SPM): A Review

For many of measurements, it is important to know the interaction of the measuring device with the artefact being measured in order to determine the accurate magnitude of the quantity. Mechanical, electrical, magnetic, optical and chemical properties of materials are also important parameters that need to be quantified at the micro and nanometre level. In this review, we introduce principles of scanning probe microscopy (SPM) and related technique; and also give the advance in nano-/micro-electro-mechanical systems (NEMS/MEMS) measurements using SPM. Firstly, we described state of the SPMs, their essential components and recent developments in this field. Then, conventional as well as advanced instruments have been addressed, measurement requirements discussed for measurement and fabrication. Finally, many different applications of SPMs in micro/nano electronics fields such as high resolution imaging, micro/nano-electronics, Metrology and manipulation and spectroscopy have been described in the article. Nevertheless, SPMs are advancing, supported by user-friendly and application-oriented features, improved software and combination with other instruments high precision measurement fields.