Source & Drain Contact Module for FDSOI Mosfets : Silicidation and Strain Engineering

Veronique Carron; Fabrice Nemouchi; David Cooper; Jean-Michel Hartmann; Jean-Francois Damlencourt; Sophie Bernasconi; Sylvie Favier; Yves Morand

doi:10.1149/MA2013-02/33/2236

ECS Meeting Abstracts

Source & Drain Contact Module for FDSOI Mosfets : Silicidation and Strain Engineering

Veronique Carron¹, Fabrice Nemouchi¹, David Cooper¹, Jean-Michel Hartmann¹, Jean-Francois Damlencourt¹, Sophie Bernasconi¹, Sylvie Favier² and Yves Morand²

© 2013 ECS - The Electrochemical Society
ECS Meeting Abstracts, Volume MA2013-02, E12-ULSI Process Integration 8 Citation Veronique Carron et al 2013 Meet. Abstr. MA2013-02 2236 DOI 10.1149/MA2013-02/33/2236

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¹ CEA, LETI

² STMicroelectronics

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