PEG, PPG, and Their Triblock Copolymers as Suppressors in Copper Electroplating

ECS Meeting Abstracts

Joshua W. Gallaway¹, Mark Willey² and Alan C. West¹

© 2008 ECS - The Electrochemical Society
ECS Meeting Abstracts, Volume MA2008-02, F2 - Electronics Packaging 3 Citation Joshua W. Gallaway et al 2008 Meet. Abstr. MA2008-02 2504 DOI 10.1149/MA2008-02/38/2504

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¹ Columbia University

² Novellus

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