A Morphological, Chemical and Electrical Study of HfSiON Films Properties for Interpoly Dielectric Applications in Flash Memories

Annalisa Del Vitto¹, Rossella Piagge¹, Massimo Caniatti¹, Claudia Wiemer², Giuseppe Pavia¹, Francesca Sammiceli¹, Enrica Ravizza¹, Salvatore Grasso¹, Simona Spadoni¹, Alessandro Sebastiani¹, Claudia Scozzari¹, Gabriella Ghidini¹, Christophe Pomarede³, Jan Willem Maes⁴ and Mauro Alessandri¹

© 2007 ECS - The Electrochemical Society
ECS Meeting Abstracts, Volume MA2007-02, E4 - High Dielectric Constant Materials and Gate Stack 5 Citation Annalisa Del Vitto et al 2007 Meet. Abstr. MA2007-02 1160 DOI 10.1149/MA2007-02/20/1160