Abstract
We report on the combinatorial film formation of Mo(1-x)WxS2 alloy with RF magnetron sputtering, and its evaluation by X-ray photoelectron spectroscopy, X-ray diffraction, Raman spectroscopy, and spectroscopic ellipsometry. We confirmed the composition gradient in the sample. In addition, Raman peak derived from the 1T structure was observed especially in the W-rich composition region although majority was from 2H. The concave-up bowing in the bandgap for Mo(1-x)WxS2 was confirmed. However, the bandgap for the 100% MoS2 and WS2 were slightly smaller than the reported value, and we consider that it is because of the phase transition from 2H to 1T structure.