Morphological and Structural Study of CVD MoO3-Cr2O3 Films

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© 2009 ECS - The Electrochemical Society
, , Citation Tatyana Ivanova et al 2009 ECS Trans. 25 221 DOI 10.1149/1.3207594

1938-5862/25/8/221

Abstract

The paper presents the deposition of mixed molybdenum - chromium oxide films and characterization of their morphology, structure and the optoelectronic properties. The thin films are obtained by atmospheric pressure CVD technique at relatively low substrate temperatures. Raman and FTIR analyses are applied for structural transformation changes, induced by thermal treatments. Electron microscopy study reveals their morphology. Optical properties were characterized by UV-VIS spectroscopy. An improvement of films optical and electrochromic performance has been observed in comparison with the single Cr2O3 oxide films. The results are encouraging for successful preparation of good MoO3 - Cr2O3 electrochromic electrodes.

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