Silicon Impurity Distribution as Revealed by Pulsed MOS C‐V Measurements

Journal of The Electrochemical Society

W. van Gelder¹ and E. H. Nicollian¹

© 1971 ECS - The Electrochemical Society
Journal of The Electrochemical Society, Volume 118, Number 1 Citation W. van Gelder and E. H. Nicollian 1971 J. Electrochem. Soc. 118 138 DOI 10.1149/1.2407927

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¹ Bell Telephone Laboratories, Inc., Allentown, Pennsylvania 18103 and Murray Hill, New Jersey 07974

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