Abstract
The relationship between the structural properties of 
and deposition conditions is studied with thermal desorption spectroscopy. The principal thermally desorbed species, except for 
, are divided into two categories: 
species and ethoxyl‐group‐related species. Most part of the 
species, such as 
, OH, O and 
, are generated from silanol groups rather than actual water in the oxide. In contrast with O‐atom desorption, 
desorption is not synchronized with 
desorption. It is likely that desorbed 
has its origin in ozone included in the source gas. The ethoxyl‐group‐related species, including 
, 
, 
, and 
, arise from components that have been incorporated into the oxide atomic network due to the incompleteness of TEOS decomposition. The dependence of thermal desorption spectra on source‐gas composition and deposition temperature is described.