Growth Texture of Polycrystalline Silicon Prepared by Chemical Vapor Deposition

Baruch Pratt; Subhash Kulkarni; D. P. Pope; C. D. Graham

doi:10.1149/1.2132688

Journal of The Electrochemical Society

Growth Texture of Polycrystalline Silicon Prepared by Chemical Vapor Deposition

Baruch Pratt¹, Subhash Kulkarni¹, D. P. Pope¹ and C. D. Graham Jr.¹

© 1976 ECS - The Electrochemical Society
Journal of The Electrochemical Society, Volume 123, Number 11 Citation Baruch Pratt et al 1976 J. Electrochem. Soc. 123 1760 DOI 10.1149/1.2132688

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¹ Departments of Electrical Engineering and Science, and Metallurgy and Materials Science, University of Pennsylvania, Philadelphia, Pennsylvania 19174

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Received 7 May 1976
Revised 27 July 1976

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