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Tsukasa Tada1
© 1983 ECS - The Electrochemical Society
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Citation Tsukasa Tada 1983 J. Electrochem. Soc. 130 912
DOI 10.1149/1.2119857
24 Total downloads
Halogenated alkyl α‐chloroacrylate series polymer materials, designed based on the molecular orbital theory, have been investigated as positive electron resists. Both high sensitivity and good thermal stability are accomplished at the same time for these positive resists. Detailed studies of an EBR‐9 positive electron resist are also presented.
