Abstract
The characteristics of lead-zirconate-titanate (PZT) films formed by photo-assisted decomposition of metal organic sol-gel polymer at low temperatures using a 172 nm excimer lamp is reported. The thickness of the films formed on Si was determined using ellipsometry while their composition was determined by electron probe X-ray microanalysis. Current-voltage measurements showed that the leakage current densities in the PZT films were over an order of magnitude less than those obtained in films prepared by conventional thermal processing.