Characterization of Lead-Zirconate-Titanate (PZT) Films Formed by Photo-Decomposition of Metal Organic Polymer

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Copyright (c) 1999 The Japan Society of Applied Physics
, , Citation Jun-Ying Zhang and Ian W. Boyd 1999 Jpn. J. Appl. Phys. 38 L393 DOI 10.1143/JJAP.38.L393

1347-4065/38/4A/L393

Abstract

The characteristics of lead-zirconate-titanate (PZT) films formed by photo-assisted decomposition of metal organic sol-gel polymer at low temperatures using a 172 nm excimer lamp is reported. The thickness of the films formed on Si was determined using ellipsometry while their composition was determined by electron probe X-ray microanalysis. Current-voltage measurements showed that the leakage current densities in the PZT films were over an order of magnitude less than those obtained in films prepared by conventional thermal processing.

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