Experimental Studies of Secondary Electron Emission of TiO2 and Ti

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Published 6 October 2006 • Copyright (c) 2006 The Japan Society of Applied Physics
, , Citation Takeshi Iyasu et al 2006 Jpn. J. Appl. Phys. 45 7879 DOI 10.1143/JJAP.45.7879

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1 Department of Information Science, Osaka Institute of Technology, 1-79-1 Kitayama, Hirakata, Osaka 573-0196, Japan

2 Department of Electrical and Electronics Engineering, Faculty of Engineering, Setsunan University, 17-8 Ikeda-Nakamachi, Neyagawa, Osaka 572-8508, Japan

3 Advanced Materials Laboratory, National Institute for Materials Science, 1-1 Kohto, Mikazuki-cho, Sayo, Hyogo 697-5148, Japan

Dates

  1. Received 3 March 2006
  2. Accepted 11 July 2006
  3. Published

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Abstract

Secondary electron emission yield, δ, was measured as a function of primary electron energy, EP, using an Auger electron microscope to obtain the δ(EP) curve of TiO2 for the first time. As a reference, the δ(EP) curve was also measured for Ti to verify the accuracy of this experiment. The construction of a specific sample holder was carried out for the precise measurement of secondary electron emission. The maximum secondary electron yield δm=1.2 at EP=260 eV for TiO2 whereas δm=0.9 at EP=280 eV for Ti.

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10.1143/JJAP.45.7879