Mass Spectrometric Measurements of CO2 Laser Discharges with Time Resolution

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Copyright (c) 1992 The Japan Society of Applied Physics
, , Citation Yuan-Liang Lan Yuan-Liang Lan and Tai-Chiung Hsieh Tai-Chiung Hsieh 1992 Jpn. J. Appl. Phys. 31 2435 DOI 10.1143/JJAP.31.2435

1347-4065/31/8R/2435

Abstract

In mass spectrometric measurements, knowledge of the gas dwell time in the glow discharge region has been utilized to time-resolve the variations of CO2 partial pressure in CO2 laser discharges. The measured data are interpreted by a dissociation-reformation scheme of CO2 molecules in the discharge. Rate coefficients that characterize the CO2 equilibrium process are evaluated, and their technical implications are discussed.

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10.1143/JJAP.31.2435