Abstract
The representative figure method has been proposed in previous papers to reduce the processing time for proximity effect correction. The Phantom, which is an application of the representative figure method to Ghost, assigns only one representative rectangle in each small area instead of the inverted original patterns, and the rectangles are exposed with a defocused beam. From the results of numerical calculation and experiment, there is little difference in correction effect between Phantom and Ghost, even if the small area size is nearly equal to the electron backscattering range. So, the small area size can be set as large as the backscattering range. It is shown that the same correction accuracy as Ghost can be obtained by Phantom. The correction exposure time can be reduced to 1/25∼1/500 that of Ghost by Phantom.