Micro Roll-to-Roll Patterning Process and Its Application on Flexible Display

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Published 22 June 2009 Copyright (c) 2009 The Japan Society of Applied Physics
, , Citation Cheng-Yao Lo et al 2009 Jpn. J. Appl. Phys. 48 06FC04 DOI 10.1143/JJAP.48.06FC04

1347-4065/48/6S/06FC04

Abstract

Novel electrode patterning techniques on thin polymer substrates were developed on a roll-to-roll (reel-to-reel, R2R) printing system. Hot embossing, laser ablation, and lift-off processes were evaluated for mass production for active-matrix display arrays with 1000 µm display pixels by using the concept of micro electro mechanical system (MEMS) Fabry–Perot etalon. Among which, the newly developed lift-off flexography process provided the best pattern integrity with 100 µm resolution. The demonstrator of display array proved R2R printing system's possibility and capability under 1 m/s speed. A complete multilayer stack demonstration with alignment process also indicated its variable application. Further actuation for the MEMS display proved the robustness of device made by printing techniques.

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10.1143/JJAP.48.06FC04