Abstract
The thin-film micromirror array (TMA) is a new reflective-type light modulator that uses thin film piezoelectric actuators in conjunction with micromirrors by surface micromachining technology. The TMA optical system is designed based on Schlieren optics and the module is fabricated by a conventional integrated circuit (IC) process. The design of the TMA has evolved to enhance the optical performance as well as mechanical uniformity and electrical reliability. The hidden actuator design TMA has a fill factor (FF) of over 90% and a module light efficiency (MLE) of 65%. A working prototype of a video graphics array (VGA) format TMA display system with three modules shows more than 7 lumen per watt light efficiency.