High Resolution Electron Microscopic Studies of Amorphous SiO Film

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Copyright (c) 1984 The Japan Society of Applied Physics
, , Citation Chihiro Kaito and Tsukasa Shimizu 1984 Jpn. J. Appl. Phys. 23 L7 DOI 10.1143/JJAP.23.L7

1347-4065/23/1A/L7

Abstract

High resolution electron microscopic (HREM) observations have been done for vacuum deposited SiO films. Areas 1∼2 nm in size with lattice fringes are seen in the micrographs. It is shown that the films are composed of a mixture of silicon and α-cristobalite.

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10.1143/JJAP.23.L7