Skip to main content
SpringerLink
Log in

Non-equilibrium in low-temperature plasmas

  • Topical Review
  • Published:
The European Physical Journal D Aims and scope Submit manuscript

Abstract

The wide range of applications of cold plasmas originates from their special characteristic of being a physical system out of thermodynamic equilibrium. This property enhances its reactivity at low gas temperature and allows to obtain macroscopic effects with a moderate energy consumption. In this review, the basic concepts of non-equilibrium in ionized gases are treated by showing why and how non-equilibrium functions of the degrees of freedom are formed in a variety of natural and man-made plasmas with particular emphasis on the progress made in the last decade. The modern point of view of a molecular basis of non-equilibrium and of a state-to-state kinetic approach is adopted. Computational and diagnostic techniques used to investigate the non-equilibrium conditions are also surveyed.

Graphical abstract

This is a preview of subscription content, log in via an institution to check access.

Access this article

Log in via an institution

Price excludes VAT (USA)
Tax calculation will be finalised during checkout.

Instant access to the full article PDF.

Institutional subscriptions

Similar content being viewed by others

References

  1. V.A. Godyak, Phys. Plasmas 20, 101611 (2013)

    Article  ADS  Google Scholar 

  2. A. Fridman, L. Kennedy, Plasma Physics and Engineering (CRC Press, 2011)

  3. V. Pierrard, M. Lazar, Solar Phys. 267, 153 (2010)

    Article  ADS  Google Scholar 

  4. I.D. Kaganovich, Y. Raitses, D. Sydorenko, A. Smolyakov, Phys. Plasmas 14, 057104 (2007)

    Article  ADS  Google Scholar 

  5. D. Sydorenko, A. Smolyakov, I. Kaganovich, Y. Raitses, IEEE Trans. Plasma Sci. 34, 815 (2006)

    Article  ADS  Google Scholar 

  6. F. Taccogna, G. Mizzi, Contrib. Plasm. Phys. 54, 877 (2014)

    Article  ADS  Google Scholar 

  7. F. Taccogna, Eur. Phys. J. D 68, 199 (2014)

    Article  ADS  Google Scholar 

  8. A.I. Morozov, V.V. Savel’ev, Plasma Phys. Rep. 27, 570 (2001)

    Article  ADS  Google Scholar 

  9. J.P. Sheehan, N. Hershkowitz, Plasma Sources Sci. Technol. 20, 063001 (2011)

    Article  ADS  Google Scholar 

  10. G.D. Hobbs, J.A. Wesson, Plasma Phys. 9, 85 (1967)

    Article  ADS  Google Scholar 

  11. F. Taccogna, M. Longo, S. Capitelli, Phys. Plasmas 12, 093506 (2005)

    Article  ADS  Google Scholar 

  12. M.D. Campanell, Phys. Plasmas 22, 040702 (2015)

    Article  ADS  Google Scholar 

  13. M.C. Griskey, R.L. Stenzel, Phys. Rev. Lett. 82, 556 (1999)

    Article  ADS  Google Scholar 

  14. F. Taccogna, S. Longo, M. Capitelli, R. Schneider, Appl. Phys. Lett. 94, 251502 (2009)

    Article  ADS  Google Scholar 

  15. M.D. Campanell, A.V. Khrabrov, I.D. Kaganovich, Phys. Plasmas 19, 123513 (2012)

    Article  ADS  Google Scholar 

  16. A.I. Smolyakov, W. Frias, I.D. Kaganovich, Y. Raitses, Phys. Rev. Lett. 111, 115002 (2013)

    Article  ADS  Google Scholar 

  17. D. Sydorenko, A. Smolyakov, I. Kaganovich, Y. Raitses, Phys. Plasmas 14, 013508 (2007)

    Article  ADS  Google Scholar 

  18. F. Taccogna, S. Longo, M. Capitelli, R. Schneider, Contrib. Plasm. Phys. 48, 375 (2008)

    Article  ADS  Google Scholar 

  19. A. Aanesland, J. Bredin, P. Chabert, V. Godyak, Appl. Phys. Lett. 100, 044102 (2012)

    Article  ADS  Google Scholar 

  20. U. Fantz, L. Schiesko, D.W. Wünderlich, Plasma Sources Sci. Technol. 23, 044002 (2014)

    Article  ADS  Google Scholar 

  21. A. Shagayda, Phys. Plasmas 19, 083503 (2012)

    Article  ADS  Google Scholar 

  22. V.Y. Fedotov, A.A. Ivanov, G. Guerrini, A.N. Vesselovzorov, M. Bacal, Phys. Plasmas 6, 4360 (1999)

    Article  ADS  Google Scholar 

  23. X.L. Zhang, R.S. Fletcher, S.L. Rolston, Phys. Rev. Lett. 101, 195002 (2008)

    Article  ADS  Google Scholar 

  24. J.P. Boeuf, Frontiers Phys. 2, 00074 (2014)

    Article  ADS  Google Scholar 

  25. A. Ducrocq, J.C. Adam, A. Héron, G. Laval, Phys. Plasmas 13, 102111 (2006)

    Article  ADS  Google Scholar 

  26. S. Tsikata, T. Minea, Phys. Rev. Lett. 114, 185001 (2015)

    Article  ADS  Google Scholar 

  27. V.A. Godyak, R.B. Piejak, Phys. Rev. Lett. 65, 996 (1990)

    Article  ADS  Google Scholar 

  28. S. Wilczek, J. Trieschmann, J. Schulze, E. Schuengel, R.P. Brinkmann, A. Derzsi, I. Korolov, Z. Donk, T. Mussenbrock, Plasma Sources Sci. Technol. 24, 024002 (2015)

    Article  ADS  Google Scholar 

  29. S. Wilczek, J. Trieschmann, D. Eremin, R.P. Brinkmann, J. Schulze, E. Schuengel, A. Derzsi, I. Korolov, P. Hartmann, Z. Donkó, T. Mussenbrock, Phys. Plasmas 23, 063514 (2016)

    Article  ADS  Google Scholar 

  30. I.D. Kaganovich, V.I. Kolobov, L.D. Tsendin, Appl. Phys. Lett. 69, 3818 (1996)

    Article  ADS  Google Scholar 

  31. T. Lafleur, P. Chabert, Plasma Sources Sci. Technol. 24, 044002 (2015)

    Article  ADS  Google Scholar 

  32. H.C. Lee, M.H. Lee, C.W. Chung, Appl. Phys. Lett. 96, 041503 (2010)

    Article  ADS  Google Scholar 

  33. M. Bacal, Rev. Sci. Instrum. 71, 3981 (2000)

    Article  ADS  Google Scholar 

  34. N. Oudini, F. Taccogna, A. Bendib, A. Aanesland, Phys. Plasmas 21, 063515 (2014)

    Article  ADS  Google Scholar 

  35. N. Oudini, N. Sirse, R. Benallal, F. Taccogna, A. Aanesland, A. Bendib, A.R. Ellingboe, Phys. Plasmas 22, 073509 (2015)

    Article  ADS  Google Scholar 

  36. M. Capitelli, R. Celiberto, G. Colonna, F. Esposito, C.G. Hassouni, A. Laricchiuta, S. Longo, Fundamental aspects of plasma chemical physics (Springer, 2016)

  37. L.D. Pietanza, G. Colonna, G. D’Ammando, A. Laricchiuta, M. Capitelli, Plasma Sources Sci. Technol. 24, 042002 (2015)

    Article  ADS  Google Scholar 

  38. Z.L. Petrović, S. Dujko, D. Marić, G. Malović, Ž. Nikitović, O. Šašić, J. Jovanović, V. Stojanović, M. Radmilović-Radenović, J. Phys. D: Appl. Phys. 42, 194002 (2009)

    Article  ADS  Google Scholar 

  39. I. Mann, N. Meyer-Vernet, A. Czechowski, Phys. Rep. 536, 1 (2014)

    Article  ADS  Google Scholar 

  40. M. Chaudhuri, A.V. Ivlev, S.A. Khrapak, H.M. Thomas, G.E. Morfill, Soft Matter 7, 1287 (2011)

    Article  ADS  Google Scholar 

  41. S.I. Krasheninnikov, R.D. Smirnov, A.Y. Pigarov, T.K. Soboleva, D.A. Mendis, J. Plasma Phys. 76, 377 (2010)

    Article  ADS  Google Scholar 

  42. L. Boufendi, A. Bouchoule, Plasma Sources Sci. Technol. 11, A211 (2002)

    Article  ADS  Google Scholar 

  43. N. Bilik, R. Anthony, B.A. Merritt, E.S. Aydil, U.R. Kortshagen, J. Phys. D: Appl. Phys. 48, 105204 (2015)

    Article  ADS  Google Scholar 

  44. I.B. Denysenko, H. Kersten, N.A. Azarenkov, Phys. Rev. E 92, 033102 (2015)

    Article  ADS  Google Scholar 

  45. F. Iza, G.J. Kim, S.M. Lee, J.K. Lee, J.L. Walsh, Y.T. Zhang, M. Kong, Plasma Processes Polymers 5, 322 (2008)

    Article  Google Scholar 

  46. K.H. Schoenbach, K. Becker, Eur. Phys. J. D 70, 29 (2016)

    Article  ADS  Google Scholar 

  47. R.J. Carman, R.P. Mildren, J. Phys. D: Appl. Phys. 33, L99 (2000)

    Article  ADS  Google Scholar 

  48. Y. Zhang, W. Jiang, A. Bogaerts, J. Phys. D: Appl. Phys. 47, 435201 (2014)

    Article  ADS  Google Scholar 

  49. F. Iza, J.K. Lee, M.G. Kong, Phys. Rev. Lett. 99, 075004 (2007)

    Article  ADS  Google Scholar 

  50. S.Q. Liu, H. Chen, Phys. Plasmas 19, 012303 (2012)

    Article  ADS  Google Scholar 

  51. S.K. Mishra, S. Misra, Phys. Plasmas 21, 073706 (2014)

    Article  ADS  Google Scholar 

  52. E. Ahedo, Plasma Physics Controlled Fusion 53, 124037 (2011)

    Article  ADS  Google Scholar 

  53. S. Mazouffre, V. Kulaev, J.P. Luna, Plasma Sources Sci. Technol. 18, 034022 (2009)

    Article  ADS  Google Scholar 

  54. G. Bourgeois, S. Mazouffre, N. Sadeghi, Phys. Plasmas 17, 113502 (2010)

    Article  ADS  Google Scholar 

  55. I.G. Mikellides, I. Katz, R.A. Kuharski, M.J. Mandell, J. Propul. Power 21, 111 (2005)

    Article  Google Scholar 

  56. L.B. King, A.D. Gallimore, J. Propul. Power 20, 228 (2004)

    Article  Google Scholar 

  57. F. Taccogna, S. Longo, M. Capitelli, Eur. Phys. J.: Appl. Phys. 22, 29 (2003)

    ADS  Google Scholar 

  58. F. Taccogna, Contrib. Plasm. Phys. 52, 744 (2012)

    Article  ADS  Google Scholar 

  59. F. Galli, M. Mamunuru, U.R. Kortshagen, Plasma Sources Sci. Technol. 21, 035002 (2012)

    Article  ADS  Google Scholar 

  60. T. Mussenbrock, Contrib. Plasm. Phys. 52, 571 (2012)

    Article  ADS  Google Scholar 

  61. D.H. Kang, D.K. Lee, K.B. Kim, J.J. Lee, J. Joo, Appl. Phys. Lett. 84, 3283 (2004)

    Article  ADS  Google Scholar 

  62. E. Schüngel, D. Eremin, J. Schulze, T. Mussenbrock, U. Czarnetzki, J. Appl. Phys. 112, 053302 (2012)

    Article  ADS  Google Scholar 

  63. A. Derzsi, T. Lafleur, J.P. Booth, I. Korolov, Z. Donkó, Plasma Sources Sci. Technol. 25, 015004 (2016)

    Article  ADS  Google Scholar 

  64. P. Diomede, D.J. Economou, T. Lafleur, J.P. Booth, S. Longo, Plasma Sources Sci. Technol. 23, 065049 (2014)

    Article  Google Scholar 

  65. E. Schüngel, Z. Donkó, P. Hartmann, A. Derzsi, I. Korolov, J. Schulze, Plasma Sources Sci. Technol. 24, 045013 (2015)

    Article  ADS  Google Scholar 

  66. B. Berger, S. Brandt, J. Franek, E. Schüngel, M. Koepke, T. Mussenbrock, J. Schulze, J. Appl. Phys. 118, 223302 (2015)

    Article  ADS  Google Scholar 

  67. J. Trieschmann, M. Shihab, D. Szeremley, A.E. Elgendy, S. Gallian, D. Ermin, R.P. Brinkmann, T. Mussenbrock, J. Phys. D: Appl. Phys. 46, 084016 (2013)

    Article  ADS  Google Scholar 

  68. F. Taccogna, P. Minelli, P. Diomede, S. Longo, M. Capitelli, R. Schneider, Plasma Sources Sci. Technol. 20, 024009 (2011)

    Article  ADS  Google Scholar 

  69. A. Aanesland, A. Meige, P. Chabert, J. Phys.: Conf. Ser. 162, 012009 (2009)

    ADS  Google Scholar 

  70. H.W. Lee, G.Y. Park, Y.S. Seo, Y.H. Im, S.B. Shim, H.J. Lee, J. Phys. D: Appl. Phys. 44, 053001 (2011)

    Article  ADS  Google Scholar 

  71. D.J. Economou, Appl. Surf. Sci. 253, 6672 (2007)

    Article  ADS  Google Scholar 

  72. M. Bacal, M. Wada, Appl. Phys. Rev. 2, 021305 (2015)

    Article  ADS  Google Scholar 

  73. P. Chabert, T.E. Sheridan, J. Phys. D: Appl. Phys. 33, 1854 (2000)

    Article  ADS  Google Scholar 

  74. U. Fantz, P. Franzen, D. Wünderlich, Chem. Phys. 398, 7 (2012)

    Article  ADS  Google Scholar 

  75. N. Kohen, Ph.D. thesis, Université Toulouse 3 Paul Sabatier, 2015

  76. A. Fidman, Plasma Chemistry (Cambridge University Press, 2008)

  77. Nonequilibrium Vibrational Kinetics, edited by M. Capitelli (Springer-Verlag, 1986)

  78. V. Laporta, R. Celiberto, J.M. Wadehra, Plasma Sources Sci. Technol. 21, 055018 (2012)

    Article  ADS  Google Scholar 

  79. V. Laporta, D.A. Little, R. Celiberto, J. Tennyson, Plasma Sources Sci. Technol. 23, 065002 (2014)

    Article  ADS  Google Scholar 

  80. M. Rutigliano, A. Pieretti, M. Cacciatore, N. Sanna, V. Barone, Surf. Sci. 600, 4239 (2006)

    Article  ADS  Google Scholar 

  81. R. Celiberto, R. Janev, A. Laricchiuta, M. Capitelli, J. Wadehra, D. Atems, At. Data Nucl. Data Tables 77, 161 (2001)

    Article  ADS  Google Scholar 

  82. G. Billing, E. Fisher, Chem. Phys. 43, 395 (1979)

    Article  ADS  Google Scholar 

  83. V. Doroshenko, N. Kudryavtsev, S. Novikov, V. Smetanin, High Temperature 28, 70 (1990)

    Google Scholar 

  84. D. Giordano, V. Bellucci, G. Colonna, M. Capitelli, I. Armenise, C. Bruno, J. Thermophys. Heat Transf. 11, 27 (1997)

    Article  Google Scholar 

  85. I. Armenise, F. Esposito, Chem. Phys. 446, 30 (2015)

    Article  ADS  Google Scholar 

  86. F. Esposito, I. Armenise, M. Capitelli, Chem. Phys. 331, 1 (2006)

    Article  ADS  Google Scholar 

  87. http://phys4entrydb.ba.imip.cnr.it/Phys4EntryDB/

  88. C. Treanor, J. Rich, R. Rehm, J. Chem. Phys. 48, 1798 (1968)

    Article  ADS  Google Scholar 

  89. W. Urban, J.X. Lin, V. Subramaniam, M. Havenith, J. Rich, Chem. Phys. 130, 389 (1989)

    Article  ADS  Google Scholar 

  90. I. Adamovich, S. Saupe, M. Grassi, O. Schulz, S. Macheret, J. Rich., Chem. Phys. 173, 491 (1993)

    Article  ADS  Google Scholar 

  91. S. De Benedictis, G. Dilecce, M. Simek, J. Chem. Phys. 110, 2947 (1999)

    Article  ADS  Google Scholar 

  92. P. Supiot, D. Blois, S. De Benedictis, G. Dilecce, M. Barj, A. Chapput, O. Dessaux, P. Goudmand, J. Phys. D: Appl. Phys. 32, 1887 (1999)

    Article  ADS  Google Scholar 

  93. P.A. Sá, V. Guerra, J. Loureiro, N. Sadeghi, J. Phys. D: Appl. Phys. 37, 221 (2004)

    Article  ADS  Google Scholar 

  94. V. Laporta, J. Tennyson, R. Celiberto, Plasma Sources Sci. Technol. 25, 06LT02 (2016)

    Article  Google Scholar 

  95. M. Bacal, Nucl. Fusion 46, S250 (2006)

    Article  ADS  Google Scholar 

  96. M. Hopkins, K. Mellon, Phys. Rev. Lett. 67, 449 (1991)

    Article  ADS  Google Scholar 

  97. M. Bacal, Chem. Phys. 398, 3 (2012)

    Article  ADS  Google Scholar 

  98. A. Bogaerts, T. Kozak, K. van Laer, R. Snoeckx, Faraday Discuss. 183, 217 (2015)

    Article  ADS  Google Scholar 

  99. T. Kozak, A. Bogaerts, Plasma Sources Sci. Technol. 23, 045004 (2014)

    Article  ADS  Google Scholar 

  100. T. Kozak, A. Bogaerts, Plasma Sources Sci. Technol. 24, 015024 (2015)

    Article  ADS  Google Scholar 

  101. R. Aerts, T. Martens, A. Bogaerts, J. Phys. Chem. C 116, 23257 (2012)

    Article  Google Scholar 

  102. L.D. Pietanza, Chem. Phys. 468, 44 (2016)

    Article  ADS  Google Scholar 

  103. I. Armenise, E.V. Kustova, Chem. Phys. 415, 269 (2013)

    Article  ADS  Google Scholar 

  104. L.M. Martini, G. Dilecce, M. Scotoni, P. Tosi, S. De Benedictis, Plasma Process. Polym. 11, 232 (2014)

    Article  Google Scholar 

  105. M. Lieberman, A. Lichtenberg, Principles of plasma discharges and materials processing (Wiley-Interscience, 1994)

  106. X. Lu, G.V. Naidis, M. Laroussi, S. Reuter, D.B. Graves, K. Ostrikov, Phys. Rep. 630, 1 (2016)

    Article  ADS  MathSciNet  Google Scholar 

  107. A. Starikovskiy, N. Aleksandrov, Prog. Energy Combust. Sci. 39, 61 (2013)

    Article  Google Scholar 

  108. Y. Ju, W. Sun, Prog. Energy Combust. Sci. 48, 21 (2015)

    Article  Google Scholar 

  109. J. Van Durme, J. Dewulf, C. Leys, H. Van Langehowe, Appl. Catal. B: Environ. 78, 324 (2008)

    Article  Google Scholar 

  110. M. Golde, Int. J. Chem. Kin. 20, 75 (1988)

    Article  Google Scholar 

  111. U. Kogelschatz, Plasma Chem. Plasma Process. 23, 1 (2003)

    Article  Google Scholar 

  112. G.D. Stancu, F. Kaddouri, D.A. Lacoste, C.O. Laux, J. Phys. D: Appl. Phys. 43, 124002 (2010)

    Article  ADS  Google Scholar 

  113. H. Chen, H. Lee, M. Chang, Plasma Process. Polym. 3, 682 (2006)

    Article  Google Scholar 

  114. F. Massines, N. Gherardi, N. Naudé, P. Segur, Plasma Phys. Control. Fusion 47, B577 (2005)

    Article  Google Scholar 

  115. G. Dilecce, P.F. Ambrico, S. De Benedictis, Plasma Sources Sci. Technol. 16, 511 (2007)

    Article  ADS  Google Scholar 

  116. G. Colonna, A. D’Angola, Plasma Modeling: Methods and Applications (Institute of Physics, New York, in press)

  117. N.R. Pinhão, Z. Donkó, D. Loffhagen, M.J. Pinheiro, E.A. Richley, Plasma Sources Sci. Technol. 13, 719 (2004)

    Article  ADS  Google Scholar 

  118. G.J.M. Hagelaar, L.C. Pitchford, Plasma Sources Sci. Technol. 14, 722 (2005)

    Article  ADS  Google Scholar 

  119. S. Dujko, R.D. White, Z.L. Petrović, R.E. Robson, Plasma Sources Sci. Technol. 20, 024013 (2011)

    Article  ADS  Google Scholar 

  120. G.K. Grubert, D. Loffhagen, J. Phys. D: Appl. Phys. 47, 025204 (2014)

    Article  ADS  Google Scholar 

  121. L.C. Pitchford, A.V. Phelps, Phys. Rev. A 25, 540 (1982)

    Article  ADS  Google Scholar 

  122. W.L. Morgan, Elendif for windows 9x/nt/2000/xp: The boltzmann equation solver, http://kinema.com/elendif/ (2010)

  123. N. R. Pinhão, PLASMAKIN: a chemical kinetics package, http://sourceforge.net/projects/plasmakin/ (2010)

  124. G.H.M. Hagelaar, BOLSIG+ Electron Boltzmann equation solver, http://www.bolsig.laplace.univ-tlse.fr/ (2010)

  125. M. Capitelli, I. Armenise, D. Bruno, M. Cacciatore, R. Celiberto, G. Colonna, O. De Pascale, P. Diomede, F. Esposito, C. Gorse, K. Hassouni, A. Laricchiuta, S. Longo, D. Pagano, D. Pietanza, M. Rutigliano, Plasma Sources Sci. Technol. 16, S30 (2007)

    Article  ADS  Google Scholar 

  126. G. Colonna, G. D’Ammando, L.D. Pietanza, M. Capitelli, Plasma Physics Controlled Fusion 57, 014009 (2015)

    Article  ADS  Google Scholar 

  127. R.W. Hockney, J.W. Eastwood, Computer simulation using particles (IOP Publishing Ltd, 1989)

  128. K. Nanbu, IEEE Trans. Plasma Sci. 28, 971 (2000)

    Article  ADS  Google Scholar 

  129. C.K. Birdsall, A.B. Langdon, Plasma physics via computer simulation (Taylor and Francis, 2005)

  130. J.M. Dawson, Rev. Mod. Phys. 55, 403 (1983)

    Article  ADS  Google Scholar 

  131. J.P. Verboncoeur, Plasma Physics Controlled Fusion 47, A231 (2005)

    Article  ADS  Google Scholar 

  132. D. Tskhakaya, K. Matyash, R. Schneider, F. Taccogna, Contrib. Plasm. Phys. 47, 563 (2007)

    Article  ADS  Google Scholar 

  133. V. Vahedi, M. Surendra, Comput. Phys. Commun. 87, 179 (1995)

    Article  ADS  Google Scholar 

  134. C. Wang, T. Lin, R. Caflisch, B.I. Cohen, A.M. Dimits, J. Comput. Phys. 227, 4308 (2008)

    Article  ADS  MathSciNet  Google Scholar 

  135. Y.M. Li, L.C. Pitchford, T.J. Moratz, Appl. Phys. Lett. 54, 1403 (1989)

    Article  ADS  Google Scholar 

  136. M.A. Furman, M.T.F. Pivi, Phys. Rev. ST Accel. Beams 5, 124404 (2002)

    Article  ADS  Google Scholar 

  137. R.D. Falgout, J.E. Jones, U.M. Yang, High performance preconditioners, http://computation.llnl.gov/project/linear˙solvers/software.php (2015)

  138. J.C. Adams, P.N. Swarztrauber, R. Sweet, Fishpack - efficient fortran subprograms for the solution of separable elliptic partial differential equations, https://www2.cisl.ucar.edu/resources/legacy/fishpack (2011)

  139. X.S. Li, J. Demmel, J. Gilbert, L. Grigori, P. Sao, M. Shao, I. Yamazaki, Superlu, http://crd-legacy.lbl.gov/˜xiaoye/SuperLU/ (2015)

  140. S. Balay, S. Abhyankar, M. Adams, J. Brown, P.B.K. Buschelman, L. Dalcin, V. Eijkhout, W.D. Gropp, D. Kaushik, M.G. Knepley, L.C. McInnes, K. Rupp, B.F. Smith, S. Zampini, H. Zhang, Portable, extensible toolkit for scientific computation, http://www.mcs.anl.gov/petsc (2015)

  141. A. Gupta, H. Avron, Watson sparse matrix package (wsmp), http://www.research.ibm.com/projects/wsmp (2015)

  142. C. Meierbachtol, A. Greenwood, J. Verboncoeur, B. Shanker, IEEE Trans. Plasma Sci. 43, 3778 (2015)

    Article  ADS  Google Scholar 

  143. B.W. Yu, S.L. Girshick, J. Appl. Phys. 69, 656 (1991)

    Article  ADS  Google Scholar 

  144. Z. Donkó, J. Phys. A: Math. Theor. 42, 214029 (2009)

    Article  ADS  Google Scholar 

  145. A. Fierro, J. Dickens, A. Neuber, Phys. Plasmas 21, 123504 (2014)

    Article  ADS  Google Scholar 

  146. A. Vapirev, J. Deca, G. Lapenta, S. Markidis, I. Hur, J.L. Cambier, Concurr. Comput.: Pract. Exper. 27, 581 (2015)

    Article  Google Scholar 

  147. V.I. Demidov, S.V. Ratynskaia, K. Rypdal, Rev. Sci. Instrum. 73, 3409 (2002)

    Article  ADS  Google Scholar 

  148. V.A. Godyak, V.I. Demidov, J. Phys. D: Appl. Phys. 44, 233001 (2011)

    Article  ADS  Google Scholar 

  149. S. Ratynskaia, G. Dilecce, P. Tolias, J. Plasma Phys. 81, 345810202 (2015)

    Article  Google Scholar 

  150. G. Dilecce, M. Capitelli, S. De Benedictis, J. Appl. Phys. 69, 121 (1991)

    Article  ADS  Google Scholar 

  151. T. Hoder, M. Černák, J. Paillol, D. Loffhagen, R. Brandenburg, Phys. Rev. E 86, 055401(R) (2012)

    Article  ADS  Google Scholar 

  152. G. Dilecce, Plasma Sources Sci. Technol. 23, 015011 (2014)

    Article  ADS  Google Scholar 

  153. X.M. Zhu, Y.K. Pu, J. Phys. D: Appl. Phys. 43, 015204 (2010)

    Article  ADS  Google Scholar 

  154. X.M. Zhu, J.L. Walsh, W.C. Chen, Y.K. Pu, J. Phys. D: Appl. Phys. 45, 295201 (2012)

    Article  Google Scholar 

  155. R. Winkler, D. Loffhagen, F. Sigeneger, Appl. Surf. Sci. 192, 50 (2002)

    Article  ADS  Google Scholar 

  156. S. Ratynskaia, G. Dilecce, P. Tolias, Appl. Phys. A 117, 409 (2014)

    Article  ADS  Google Scholar 

  157. E. Carbone, S. Nijdam, Plasma Phys. Controlled Fusion 57, 014026 (2015)

    Article  ADS  Google Scholar 

  158. S. Hübner, J. Sousa, J. van der Mullen, W. Graham, Plasma Sources Sci. Technol. 24, 10 (2015)

    Article  Google Scholar 

  159. H.J. van der Meiden, Plasma Phys. Controlled Fusion 52, 045009 (2010)

    Article  ADS  Google Scholar 

  160. H.J. van der Meiden, A.R. Lof, M.A. van den Berg, S. Brons, A.J.H. Donné, H.J.N. van Eck, P.M.J. Koelman, W.R. Koppers, O.G. Kruijt, N.N. Naumenko, T. Oyevaar, P.R. Prins, J. Rapp, J. Scholten, D.C. Schram, P.H.M. Smeets, G. van der Star, S.N. Tugarinov, P.A. Zeijlmans van Emmichoven, Rev. Sci. Instrum. 83, 123505 (2012)

    Article  ADS  Google Scholar 

  161. D.E. Evans, J. Katzenstein, Rep. Prog. Phys. 1969, 207 (1969)

    Article  ADS  Google Scholar 

  162. D. Froula, S. Glentzer, N. Luhmann Jr., J. Sheffield, Plasma scattering of electromagnetic radiation: theory and measurement techniques (Academic Press, 2011)

  163. E.A.D. Carbone, S. Hubner, J.M. Palomares, J.J.A.M. van der Mullen, J. Phys. D: Appl. Phys. 45, 345203 (2012)

    Article  Google Scholar 

  164. E.A.D. Carbone, S. Hubner, M. Jimenez-Diaz, J.M. Palomares, E. Iordanova, W.A.A.D. Graef, A. Gamero, J.J.A.M. van der Mullen, J. Phys. D: Appl. Phys. 45, 475202 (2012)

    Article  ADS  Google Scholar 

  165. E.V. Barnat, K. Frederickson, Plasma Sources Sci. Technol. 19, 055015 (2010)

    Article  ADS  Google Scholar 

  166. G. Dilecce, P.F. Ambrico, S. De Benedictis, J. Phys. B 28, 209 (1995)

    Article  ADS  Google Scholar 

  167. E.A. Den Hartog, T.R. O’Brian, J.E. Lawler, Phys. Rev. Lett. 62, 1500 (1989)

    Article  ADS  Google Scholar 

  168. K.P. Horn, P. Ottinger, J. Chem. Phys. 54, 3040 (1971)

    Article  ADS  Google Scholar 

  169. S. De Benedictis, R. D’Agostino, F. Cramarossa, Chem. Phys. 71, 247 (1982)

    Article  ADS  Google Scholar 

  170. S. De Benedictis, M. Capitelli, F. Cramarossa, R. D’Agostino, C. Gorse, Chem. Phys. Lett. 112, 54 (1984)

    Article  ADS  Google Scholar 

  171. G. Dilecce, S. De Benedictis, NO(X, v) distributions in rf discharges: conditions for a very high vibrational pumping, in Proc. XII International Symposium on Plasma Chemistry (ISPC) – Minneapolis, edited by J. Heberlein, D. Ernie, J. Roberts (1995), pp. 403–408

  172. N. Legay-Sommaire, F. Legay, Can. J. Phys. 48, 1966 (1969)

    Article  ADS  Google Scholar 

  173. D. Marinov, D. Lopatik, O. Guaitella, Y. Ionikh, J. Ropcke, A. Rousseau, J. Phys. D: Appl. Phys. 47, 015203 (2014)

    Article  ADS  Google Scholar 

  174. S. De Benedictis, G. Dilecce, Chem. Phys. 192, 149 (1995)

    Article  ADS  Google Scholar 

  175. S. De Benedictis, G. Dilecce, J. Phys. B 27, 615 (1994)

    Article  ADS  Google Scholar 

  176. M. Foucher, D. Marinov, E. Carbone, P. Chabert, J.P. Booth, Plasma Sources Sci. Technol. 24, 042001 (2015)

    Article  ADS  Google Scholar 

  177. W. Demtröder, Laser Spectroscopy (Springer, 2003)

  178. A. Lo, G. Cléon, P. Vervish, A. Cessou, Appl. Phys. B 107, 229 (2012)

    Article  ADS  Google Scholar 

  179. A. Lo, A. Cessou, P. Boubert, P. Vervisch, J. Phys. D: Appl. Phys. 47, 115201 (2014)

    Article  ADS  Google Scholar 

  180. W.R. Lempert, I.V. Adamovich, J. Phys. D: Appl. Phys. 47, 433001 (2014)

    Article  ADS  Google Scholar 

  181. A. Montello, Z. Yin, D. Burnette, I.V. Adamovich, W.R. Lempert, J. Phys. D: Appl. Phys. 46, 464002 (2013)

    Article  ADS  Google Scholar 

  182. B. Massabieaux, G. Gousset, M. Lefebvre, M. Péalat, J. Phys. France 48, 1939 (1987)

    Article  Google Scholar 

  183. M. Péalat, J.E. Taran, M. Bacal, F. Hillion, J. Chem. Phys. 82, 4943 (1985)

    Article  ADS  Google Scholar 

  184. H.J. Kunze, Introduction to Plasma Spectroscopy (Springer, 2009)

  185. S. Reuter, Plasma Sources Sci. Technol. 24, 054001 (2015)

    Article  ADS  Google Scholar 

  186. G. Dilecce, P.F. Ambrico, M. Simek, S. De Benedictis, J. Phys. D: Appl. Phys. 45, 125203 (2012)

    Article  ADS  Google Scholar 

  187. G. Cunge, D. Vempaire, M. Touzeau, N. Sadeghi, Appl. Phys. Lett. 91, 231503 (2007)

    Article  ADS  Google Scholar 

  188. M.H. Loh, M.A. Cappelli, Appl. Phys. Lett. 70, 1052 (1997)

    Article  ADS  Google Scholar 

  189. P. Bruggeman, G. Cunge, N. Sadeghi, Plasma Sources Sci. Technol. 21, 035019 (2012)

    Article  ADS  Google Scholar 

  190. Cavity-Enhanced Spectroscopy and sensing, edited by G. Gagliardi, H.P. Loock, Vol. 179 of Springer Series in Optical Sciences (Springer Berlin Heidelberg, 2014)

  191. J. Ropcke, P.B. Davies, N. Lang, A. Rousseau, S. Welzel, J. Phys. D: Appl. Phys. 45, 423001 (2012)

    Article  ADS  Google Scholar 

  192. S.E. Fiedler, A. Hese, A.A. Ruth, Chem. Phys. Lett. 371, 284 (2003)

    Article  ADS  Google Scholar 

  193. I. Ventrillard-Courtillot, E. Sciamma O’Brien, S. Kassi, G. Méjean, D. Romanini, Appl. Phys. B 101, 661 (2010)

    Article  ADS  Google Scholar 

  194. A. O’Keefe, D. Deacon, Rev. Sci. Instrum. 59, 2544 (1988)

    Article  ADS  Google Scholar 

  195. Cavity Ring-Down Spectroscopy: Techniques and Applications, edited by G. Berden, R. Engeln (Wiley-Blackwell, 2009)

  196. S.M. Ball, R.L. Jones, Chem. Rev. 103, 5239 (2003)

    Article  Google Scholar 

  197. B. Bakowski, G. Hancock, R. Peverall, G.A.D. Ritchie, L.J. Thornton, J. Phys. D: Appl. Phys. 37, 2064 (2004)

    Article  ADS  Google Scholar 

  198. G. Hancock, R. Peverall, G.A.D. Ritchie, L.J. Thornton, J. Phys. D: Appl. Phys. 39, 1846 (2006)

    Article  ADS  Google Scholar 

  199. G.D. Stancu, M. Janda, F. Kaddouri, D.A. Lacoste, C.O. Laux, J. Phys. Chem. A 114, 201 (2010)

    Article  Google Scholar 

  200. C. Wang, N. Srivastava, S. Scherrer, P.R. Jang, T.S. Dibble, Y. Duan, Plasma Sources Sci. Technol. 18, 025030 (2009)

    Article  ADS  Google Scholar 

  201. Z.W. Liu, X.F. Yang, A.M. Zhu, G.L. Zhao, Y. Xu, Eur. Phys. J. D 48, 365 (2008)

    Article  ADS  Google Scholar 

  202. S. Williams, M. Gupta, T. Owano, D.S. Baer, A. O’Keefe, D.R. Yarkony, S. Matsika, Opt. Lett. 29, 1066 (2004)

    Article  ADS  Google Scholar 

  203. T. Ombrello, S.H. Won, Y. Ju, S. Williams, Combust. Flame 157, 1916 (2010)

    Article  Google Scholar 

  204. R. Zaplotnik, M. Bišćan, N. Krstulović, D. Popović, S. Milošević, Plasma Sources Sci. Technol. 24, 054004 (2015)

    Article  ADS  Google Scholar 

  205. C. Hibert, I. Gaurand, O. Motret, J.M. Pouvesle, J. Appl. Phys. 85, 7070 (1999)

    Article  ADS  Google Scholar 

  206. G. Dilecce, L.M. Martini, P. Tosi, M. Scotoni, S. De Benedictis, Plasma Sources Sci. Technol. 24, 034007 (2015)

    Article  ADS  Google Scholar 

  207. K. Niemi, V.S. von der Gathen, H.F. Döbele, J. Phys. D: Appl. Phys. 34, 2330 (2001)

    Article  ADS  Google Scholar 

  208. K. Niemi, V.S. von der Gathen, H.F. Döbele, Plasma Sources Sci. Technol. 14, 375 (2005)

    Article  ADS  Google Scholar 

  209. H.F. Döbele, T. Mosbach, K. Niemi, V.S. von der Gathen, Plasma Sources Sci. Technol. 14, S31 (2005)

    Article  Google Scholar 

  210. R. Loudon, The Quantum Theory of Light (Clarendon, Oxford, 1983)

  211. P. Pezé, A. Paillous, J. Siffre, B. Dubreuil, J. Phys. D: Appl. Phys. 26, 1622 (1993)

    Article  ADS  Google Scholar 

  212. J. Amorim, G. Baravian, M. Touzeau, J. Jolly, J. Appl. Phys. 76, 1487 (1994)

    Article  ADS  Google Scholar 

  213. S. De Benedictis, G. Dilecce, in Low Temperature Plasma Technology: Methods and Applications, edited by P.K. Chu, X.P. Lu (CRC Press, Boca Raton, London, New York, 2013), pp. 261–284

  214. S. Samukawa, M. Hori, S. Rauf, K. Tachibana, P. Bruggeman, G. Kroesen, J.C. Whitehead, A.B. Murphy, A.F. Gutsol, S. Starikovskaia, U. Kortshagen, J.-P. Boeuf, T.J. Sommerer, M.J. Kushner, U. Czarnetzki, N. Mason, J. Phys. D: Appl. Phys. 45, 253001 (2012)

    Article  ADS  Google Scholar 

Download references

Author information

Authors and Affiliations

  1. CNR NANOTEC – PLasMI Lab, via Amendola 122/D, 70126, Bari, Italy

    Francesco Taccogna & Giorgio Dilecce

Authors
  1. Francesco Taccogna
    View author publications

    You can also search for this author in PubMed Google Scholar

  2. Giorgio Dilecce
    View author publications

    You can also search for this author in PubMed Google Scholar

Corresponding author

Correspondence to Francesco Taccogna.

Rights and permissions

Reprints and permissions

About this article

Check for updates. Verify currency and authenticity via CrossMark

Cite this article

Taccogna, F., Dilecce, G. Non-equilibrium in low-temperature plasmas. Eur. Phys. J. D 70, 251 (2016). https://doi.org/10.1140/epjd/e2016-70474-0

Download citation

  • Received:

  • Revised:

  • Published:

  • DOI: https://doi.org/10.1140/epjd/e2016-70474-0

Keywords

Search

Navigation