Abstract
A nanostructured sensor for the detection of hydrogen peroxide vapors has been manufactured. A gas sensitive film based on ZnO metal oxide doped with 2 at % La was obtained by high-frequency magnetron sputtering. In the temperature range from room temperature to 200°C, the impedance and current-voltage characteristics of the ZnO❬La❭ sensor were studied both before and after exposure to hydrogen peroxide vapors. Based on the analysis of the frequency characteristics of the complex impedance, an equivalent electrical circuit for the studied sensor structure was proposed, the parameters of its elements were estimated, and the approximating curves were calculated. It has been shown that the main contribution to the sensitivity of the manufactured sensor comes from the processes occurring on the surface of the semiconductor film. The effect of gas concentration changing on the sensitivity of the ZnO❬La❭ sensor has been studied.
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The work was supported by the Science Committee of RA, in the frames of the research project no. 21T-2J062.
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Translated by V.M. Aroutiounian
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Shahnazaryan, G.E., Shahkhatuni, G.A., Aleksanyan, M.S. et al. Investigations of the Impedance Characteristics of a Nanostructured ZnO\(\left\langle {{\text{La}}} \right\rangle \) Sensor for Hydrogen Peroxide Vapors. J. Contemp. Phys. 57, 254–262 (2022). https://doi.org/10.1134/S106833722203015X
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DOI: https://doi.org/10.1134/S106833722203015X