Abstract
Irradiation of silicon dioxide by an electron beam with a high specific power leads to the formation of silicon nanocrystals in the irradiated region and the formation of a modified region, i.e., a Si-SiO2 nano-composite. This work is devoted to studying the formation of this nanocomposite and of its luminescence properties.
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Original Russian Text © M.V. Zamoryanskaya, E.V. Ivanova, A.A. Sitnikova, 2011, published in Fizika Tverdogo Tela, 2011, Vol. 53, No. 7, pp. 1399–1405.
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Zamoryanskaya, M.V., Ivanova, E.V. & Sitnikova, A.A. Study of the formation of silicon nanoclusters in silicon dioxide during electron beam irradiation. Phys. Solid State 53, 1474–1480 (2011). https://doi.org/10.1134/S1063783411070353
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DOI: https://doi.org/10.1134/S1063783411070353